From latta at snf.stanford.edu  Tue Jun  6 14:50:13 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 6 Jun 2006 14:50:13 -0700
Subject: Shutdown tylan4 SNF 2006-06-06 14:50:12: growth rate high- 50%+
Message-ID: <mailman.205.1357938851.25973.tylan4-pcs@snf.stanford.edu>




From latta at snf.stanford.edu  Wed Jun  7 09:51:00 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 7 Jun 2006 09:51:00 -0700
Subject: Shutdown tylan4 SNF 2006-06-06 14:50:12: growth rate high- 50%+
Message-ID: <mailman.206.1357938851.25973.tylan4-pcs@snf.stanford.edu>

thickness fine for program run- operator error



From latta at snf.stanford.edu  Thu Jun  8 10:40:36 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 8 Jun 2006 10:40:36 -0700
Subject: Comment tylan4 SNF 2006-06-08 10:40:26: process quals- June
Message-ID: <mailman.207.1357938851.25973.tylan4-pcs@snf.stanford.edu>

over a 50 wafer spread-
wafer-to-wafer = 8.6%
within a wafer = 5.3%



From mdickey at snf.stanford.edu  Tue Jun 13 07:30:38 2006
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Tue, 13 Jun 2006 07:30:38 -0700
Subject: Shutdown tylan4 SNF 2006-06-13 07:30:37: Source
Message-ID: <mailman.208.1357938851.25973.tylan4-pcs@snf.stanford.edu>

Down for source replacement



From mdickey at snf.stanford.edu  Tue Jun 13 09:18:46 2006
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Tue, 13 Jun 2006 09:18:46 -0700
Subject: Shutdown tylan4 SNF 2006-06-13 07:30:37: Source
Message-ID: <mailman.209.1357938851.25973.tylan4-pcs@snf.stanford.edu>

Tube can still be run



From mdickey at snf.stanford.edu  Tue Jun 13 09:22:18 2006
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Tue, 13 Jun 2006 09:22:18 -0700
Subject: Problem tylan4 SNF 2006-06-13 09:22:15: Source 
Message-ID: <mailman.210.1357938851.25973.tylan4-pcs@snf.stanford.edu>

Source is empty and a replacement is on order



From latta at snf.stanford.edu  Fri Jun 23 10:19:13 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 23 Jun 2006 10:19:13 -0700
Subject: Problem tylan4 SNF 2006-06-13 09:22:15: Source 
Message-ID: <mailman.211.1357938851.25973.tylan4-pcs@snf.stanford.edu>

TransLC bubbler changed.



From latta at snf.stanford.edu  Tue Jun 27 17:23:38 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 27 Jun 2006 17:23:38 -0700
Subject: Comment tylan4 SNF 2006-06-27 17:23:37: TLCCLEAN run
Message-ID: <mailman.212.1357938852.25973.tylan4-pcs@snf.stanford.edu>