From latta at snf.stanford.edu  Thu May  4 17:09:13 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 4 May 2006 17:09:13 -0700
Subject: Comment tylan4 SNF 2006-04-17 13:58:16: Changed furnace
Message-ID: <mailman.197.1357938851.25973.tylan4-pcs@snf.stanford.edu>

Ok...



From latta at snf.stanford.edu  Thu May  4 17:10:23 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 4 May 2006 17:10:23 -0700
Subject: Comment tylan4 SNF 2006-05-04 17:10:22: process quals
Message-ID: <mailman.198.1357938851.25973.tylan4-pcs@snf.stanford.edu>

WET900   00:39:00
wafer-to-wafer = 1.5%
within-a-wafer = 2.5%



From tberg at snf.stanford.edu  Wed May 10 07:41:41 2006
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Wed, 10 May 2006 07:41:41 -0700
Subject: Shutdown tylan4 SNF 2006-05-10 07:41:40: Gas tie ins
Message-ID: <mailman.199.1357938851.25973.tylan4-pcs@snf.stanford.edu>




From tberg at snf.stanford.edu  Wed May 10 08:45:32 2006
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Wed, 10 May 2006 08:45:32 -0700
Subject: Shutdown tylan4 SNF 2006-05-10 07:41:40: Gas tie ins
Message-ID: <mailman.200.1357938851.25973.tylan4-pcs@snf.stanford.edu>

Tie ins completed back on line



From tberg at snf.stanford.edu  Wed May 10 08:45:48 2006
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Wed, 10 May 2006 08:45:48 -0700
Subject: Shutdown tylan4 SNF 2006-05-10 07:41:40: Gas tie ins
Message-ID: <mailman.201.1357938851.25973.tylan4-pcs@snf.stanford.edu>

Tie ins completed back on line



From tberg at snf.stanford.edu  Wed May 10 08:45:52 2006
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Wed, 10 May 2006 08:45:52 -0700
Subject: Comment tylan4 SNF 2006-05-04 17:10:22: process quals
Message-ID: <mailman.202.1357938851.25973.tylan4-pcs@snf.stanford.edu>

Great job



From maurice at snf.stanford.edu  Thu May 11 13:47:22 2006
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Thu, 11 May 2006 13:47:22 -0700
Subject: Shutdown tylan4 SNF 2006-05-11 13:45:53: no H2
Message-ID: <mailman.203.1357938851.25973.tylan4-pcs@snf.stanford.edu>




From maurice at snf.stanford.edu  Thu May 11 21:05:58 2006
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Thu, 11 May 2006 21:05:58 -0700
Subject: Shutdown tylan4 SNF 2006-05-11 13:45:53: no H2
Message-ID: <mailman.204.1357938851.25973.tylan4-pcs@snf.stanford.edu>

All gasses in the lab are now up and
available and the safety system is totally operational.  Please use
caution with your processes since the hydrogen and oxygen lines were
off for a long time.  Check that your process is working normally
before committing your wafers.