From latta at snf.stanford.edu Wed Nov 1 11:12:10 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 1 Nov 2006 11:12:10 -0800 Subject: Problem tylan4 SNF 2006-11-01 11:12:09: door stopped closing... Message-ID: at the first of the two microswitchws at the door end. From latta at snf.stanford.edu Wed Nov 1 16:31:14 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 1 Nov 2006 16:31:14 -0800 Subject: Comment tylan4 SNF 2006-10-03 17:18:43: Oct Process Quals Message-ID: to the archives From latta at snf.stanford.edu Wed Nov 1 16:32:34 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 1 Nov 2006 16:32:34 -0800 Subject: Problem tylan4 SNF 2006-11-01 16:32:33: Process quals bad! Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 591A Wafer-to-wafer = 12% Within-a-wafer = 14% From mdickey at snf.stanford.edu Thu Nov 2 07:19:30 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 2 Nov 2006 07:19:30 -0800 Subject: Shutdown tylan4 SNF 2006-11-02 07:19:27: Test Message-ID: Changed injector. Needs a test From latta at snf.stanford.edu Thu Nov 2 13:31:09 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 2 Nov 2006 13:31:09 -0800 Subject: Shutdown tylan4 SNF 2006-11-02 07:19:27: Test Message-ID: Visually the test wafers look good. Numbers to follow in comments after measurements. From latta at snf.stanford.edu Thu Nov 2 13:31:44 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 2 Nov 2006 13:31:44 -0800 Subject: Problem tylan4 SNF 2006-11-01 16:32:33: Process quals bad! Message-ID: injector change- new test wafers look good. From seymour at snf.stanford.edu Thu Nov 2 14:16:28 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 2 Nov 2006 14:16:28 -0800 Subject: Comment tylan4 SNF 2006-11-02 14:16:28: replaced loader circuit board Message-ID: tested loader in auto seven times and it worked great every time. From latta at snf.stanford.edu Thu Nov 2 16:15:11 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 2 Nov 2006 16:15:11 -0800 Subject: Problem tylan4 SNF 2006-11-01 11:12:09: door stopped closing... Message-ID: loader board replaced. Keeping an eye on the door closing for a little whiile. From latta at snf.stanford.edu Thu Nov 2 16:16:49 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 2 Nov 2006 16:16:49 -0800 Subject: Comment tylan4 SNF 2006-11-02 16:16:48: Nov process quals- post injector change Message-ID: WET900 00:39:00 50 wafer spread Average all wafers 949A Wafer-to-wafer = 2.4% Within-a-wafer = 1% From latta at snf.stanford.edu Thu Nov 9 13:28:18 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 9 Nov 2006 13:28:18 -0800 Subject: Comment tylan4 SNF 2006-11-02 14:16:28: replaced loader circuit board Message-ID: Door has been under observation for a week without failure. From latta at snf.stanford.edu Thu Nov 9 13:29:15 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 9 Nov 2006 13:29:15 -0800 Subject: Problem tylan4 SNF 2006-10-27 16:14:41: READ THIS! Message-ID: After control board was replaced the door is fine after one week of observation. From latta at snf.stanford.edu Thu Nov 16 16:22:49 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 16 Nov 2006 16:22:49 -0800 Subject: Problem tylan4 SNF 2006-11-16 16:22:49: H2/O2 leak alarm. Message-ID: From seymour at snf.stanford.edu Tue Nov 28 14:20:20 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 28 Nov 2006 14:20:20 -0800 Subject: Problem tylan4 SNF 2006-11-16 16:22:49: H2/O2 leak alarm. Message-ID: The tube became available this morning and i adjusted the flow controllers for all gasses and ran trans lc clean with no alarms or flow errors.