From latta at snf.stanford.edu Tue Oct 3 11:02:15 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 3 Oct 2006 11:02:15 -0700 Subject: Problem tylan4 SNF 2006-09-26 20:06:08: MKS Alarm Message-ID: most likely a door problem... From latta at snf.stanford.edu Tue Oct 3 11:03:04 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 3 Oct 2006 11:03:04 -0700 Subject: Comment tylan4 SNF 2006-09-01 16:22:09: Aug Process Quals Message-ID: to the archives... From latta at snf.stanford.edu Tue Oct 3 11:03:24 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 3 Oct 2006 11:03:24 -0700 Subject: Comment tylan4 SNF 2006-09-01 16:24:16: Last comment was for Sept Process Quals! Message-ID: to the archives, too... From latta at snf.stanford.edu Tue Oct 3 12:15:55 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 3 Oct 2006 12:15:55 -0700 Subject: Problem tylan4 SNF 2006-10-03 12:15:54: Door not closing- I think I might know why Message-ID: When the boats were being pushed for the process qual run I noticed that the first (farthest away from the door) microswitch squeeked when the flag passed through it. And the cable stopped moving. I pushed the door asembly in to get the door interlock to show 'on' at the tycom. So my guess is that something is happening with that microswitch. From latta at snf.stanford.edu Tue Oct 3 17:18:43 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 3 Oct 2006 17:18:43 -0700 Subject: Comment tylan4 SNF 2006-10-03 17:18:43: Oct Process Quals Message-ID: WET900 00:39:00 Average all wafers = 895A Wafer-to-wafer = 5.4% Within-a-wafer = 3.4% From latta at snf.stanford.edu Thu Oct 26 10:22:13 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 26 Oct 2006 10:22:13 -0700 Subject: Comment tylan4 SNF 2006-09-08 14:55:59: Proc Qual after injector & door adjustments Message-ID: to the archives. From latta at snf.stanford.edu Fri Oct 27 16:09:54 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 27 Oct 2006 16:09:54 -0700 Subject: Problem tylan4 SNF 2006-09-15 12:08:55: Door not closing completely- check to make sure it does Message-ID: Problem still. I am removing this to write another stronger caution to the labmembers. From latta at snf.stanford.edu Fri Oct 27 16:10:11 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 27 Oct 2006 16:10:11 -0700 Subject: Problem tylan4 SNF 2006-10-03 12:15:54: Door not closing- I think I might know why Message-ID: Still needs to be checked. From latta at snf.stanford.edu Fri Oct 27 16:14:41 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 27 Oct 2006 16:14:41 -0700 Subject: Problem tylan4 SNF 2006-10-27 16:14:41: READ THIS! Message-ID: The door is not closing completely. Please check to make sure it is all the way closed. It has been leaving about a one inch gap. This will severely affect your oxide thickness and uniformity. So please check!