From latta at snf.stanford.edu  Fri Sep  1 16:21:11 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 1 Sep 2006 16:21:11 -0700
Subject: Problem tylan4 SNF 2006-09-01 16:21:08: Process qual thickness low
Message-ID: <mailman.224.1357938852.25973.tylan4-pcs@snf.stanford.edu>

Average of the wafers is 665A.  Expected about 950A.  Injector?



From latta at snf.stanford.edu  Fri Sep  1 16:22:10 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 1 Sep 2006 16:22:10 -0700
Subject: Comment tylan4 SNF 2006-09-01 16:22:09: Aug Process Quals
Message-ID: <mailman.225.1357938852.25973.tylan4-pcs@snf.stanford.edu>

Average all wafers = 665A
Wafer-to-wafer = 2.5%
Within-a-wafer = 1.4%



From latta at snf.stanford.edu  Fri Sep  1 16:24:16 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 1 Sep 2006 16:24:16 -0700
Subject: Comment tylan4 SNF 2006-09-01 16:24:16: Last comment was for Sept Process Quals!
Message-ID: <mailman.226.1357938852.25973.tylan4-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Tue Sep  5 11:49:09 2006
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Tue, 5 Sep 2006 11:49:09 -0700
Subject: Comment tylan4 SNF 2006-09-05 11:49:08: injector replaced door seal checked for uniformity issues
Message-ID: <mailman.227.1357938852.25973.tylan4-pcs@snf.stanford.edu>




From latta at snf.stanford.edu  Wed Sep  6 13:27:07 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 6 Sep 2006 13:27:07 -0700
Subject: Comment tylan4 SNF 2006-08-03 16:10:25: Aug process quals results
Message-ID: <mailman.228.1357938852.25973.tylan4-pcs@snf.stanford.edu>

to the archives...



From latta at snf.stanford.edu  Fri Sep  8 14:52:29 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 8 Sep 2006 14:52:29 -0700
Subject: Problem tylan4 SNF 2006-09-01 16:21:08: Process qual thickness low
Message-ID: <mailman.229.1357938852.25973.tylan4-pcs@snf.stanford.edu>

injector replaced and door adjusted.  Still not good- see comments



From latta at snf.stanford.edu  Fri Sep  8 14:52:42 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 8 Sep 2006 14:52:42 -0700
Subject: Comment tylan4 SNF 2006-09-05 11:49:08: injector replaced door seal checked for uniformity issues
Message-ID: <mailman.230.1357938852.25973.tylan4-pcs@snf.stanford.edu>




From latta at snf.stanford.edu  Fri Sep  8 14:56:00 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 8 Sep 2006 14:56:00 -0700
Subject: Comment tylan4 SNF 2006-09-08 14:55:59: Proc Qual after injector & door adjustments
Message-ID: <mailman.231.1357938852.25973.tylan4-pcs@snf.stanford.edu>

Still not good.  Top to bottom of wafer uniformity worse (~80A) and front wafer mush thinner that back wafer (avr 756A vs 850A)
Average all wafers = 803
Wafer-to-wafer = 8.3%
Within-a-wafer = 6.5%



From latta at snf.stanford.edu  Fri Sep 15 12:08:56 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 15 Sep 2006 12:08:56 -0700
Subject: Problem tylan4 SNF 2006-09-15 12:08:55: Door not closing completely- check to make sure it does
Message-ID: <mailman.232.1357938852.25973.tylan4-pcs@snf.stanford.edu>

Folks,
Stay to make sure the door closes completely.  It has be acting up recently.



From joongsun at snf.stanford.edu  Tue Sep 26 20:06:08 2006
From: joongsun at snf.stanford.edu (joongsun at snf.stanford.edu)
Date: Tue, 26 Sep 2006 20:06:08 -0700
Subject: Problem tylan4 SNF 2006-09-26 20:06:08: MKS Alarm
Message-ID: <mailman.233.1357938852.25973.tylan4-pcs@snf.stanford.edu>

During oxidation process, MKS(what is MKS?) alarm was heard. I try to check the step when problem occured but I couldn't since it kept alarming.