Comment tylan4 SNF 2006-09-08 14:55:59: Proc Qual after injector & door adjustments

latta at snf.stanford.edu latta at snf.stanford.edu
Fri Sep 8 14:56:00 PDT 2006


Still not good.  Top to bottom of wafer uniformity worse (~80A) and front wafer mush thinner that back wafer (avr 756A vs 850A)
Average all wafers = 803
Wafer-to-wafer = 8.3%
Within-a-wafer = 6.5%




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