Problem tylan4 SNF 2006-09-26 20:06:08: MKS Alarm

joongsun at snf.stanford.edu joongsun at snf.stanford.edu
Tue Sep 26 20:06:08 PDT 2006


During oxidation process, MKS(what is MKS?) alarm was heard. I try to check the step when problem occured but I couldn't since it kept alarming. 




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