Comment tylan4 SNF 2007-12-04 17:13:25: Dec Process Quals
latta at snf.stanford.edu
latta at snf.stanford.edu
Tue Dec 4 17:13:26 PST 2007
WET900 00:39:00 50 wafer spread
Average all wafers = 1018A (expect about 1000A)
Within-a-wafer = 0.7% (expect less than 5%)
Wafer-to-wafer = 1.2% (expect less than 5%)
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