From latta at snf.stanford.edu  Fri Jun  1 17:13:35 2007
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 1 Jun 2007 17:13:35 -0700
Subject: Comment tylan4 SNF 2007-05-01 17:51:37: May process quals
Message-ID: <mailman.292.1357938852.25973.tylan4-pcs@snf.stanford.edu>

archived



From latta at snf.stanford.edu  Fri Jun  1 17:15:04 2007
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 1 Jun 2007 17:15:04 -0700
Subject: Comment tylan4 SNF 2007-06-01 17:15:04: June Process Quals
Message-ID: <mailman.293.1357938852.25973.tylan4-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
Average all wafers = 896A
Within-a-wafer = 1.1%
Wafer-to-wafer = 4.5%



From latta at snf.stanford.edu  Fri Jun  1 17:16:19 2007
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 1 Jun 2007 17:16:19 -0700
Subject: Problem tylan4 SNF 2007-06-01 17:16:18: Wafer-to-wafer results, iffy....
Message-ID: <mailman.294.1357938852.25973.tylan4-pcs@snf.stanford.edu>

June quals show 4.5% wafer to wafer, temp?



From mdickey at snf.stanford.edu  Mon Jun  4 06:54:35 2007
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Mon, 4 Jun 2007 06:54:35 -0700
Subject: Comment tylan4 SNF 2007-06-04 06:54:34: Test
Message-ID: <mailman.295.1357938852.25973.tylan4-pcs@snf.stanford.edu>

Needs test after injector change



From maurice at snf.stanford.edu  Mon Jun  4 17:59:23 2007
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Mon, 4 Jun 2007 17:59:23 -0700
Subject: Comment tylan4 SNF 2007-06-04 17:59:23: test after injector change
Message-ID: <mailman.296.1357938852.25973.tylan4-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
Average all wafers = 944A
Within-a-wafer = 1.2%
Wafer-to-wafer = 4.13%
Temps at beginning dry ox
L 884
C 895
S 899
Temps at beginning wet ox
L 895
C 900
S 901



From latta at snf.stanford.edu  Fri Jun  8 08:58:35 2007
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 8 Jun 2007 08:58:35 -0700
Subject: Comment tylan4 SNF 2007-06-04 06:54:34: Test
Message-ID: <mailman.297.1357938852.25973.tylan4-pcs@snf.stanford.edu>




From rissman at snf.stanford.edu  Tue Jun 12 09:12:02 2007
From: rissman at snf.stanford.edu (rissman at snf.stanford.edu)
Date: Tue, 12 Jun 2007 09:12:02 -0700
Subject: Problem tylan4 SNF 2007-06-01 17:16:18: Wafer-to-wafer results, iffy....
Message-ID: <mailman.298.1357938852.25973.tylan4-pcs@snf.stanford.edu>

uniformity ok



From rissman at snf.stanford.edu  Tue Jun 12 09:13:06 2007
From: rissman at snf.stanford.edu (rissman at snf.stanford.edu)
Date: Tue, 12 Jun 2007 09:13:06 -0700
Subject: Comment tylan4 SNF 2007-06-04 17:59:23: test after injector change
Message-ID: <mailman.299.1357938852.25973.tylan4-pcs@snf.stanford.edu>




From rissman at snf.stanford.edu  Tue Jun 12 09:13:18 2007
From: rissman at snf.stanford.edu (rissman at snf.stanford.edu)
Date: Tue, 12 Jun 2007 09:13:18 -0700
Subject: Comment tylan4 SNF 2007-06-01 17:15:04: June Process Quals
Message-ID: <mailman.300.1357938852.25973.tylan4-pcs@snf.stanford.edu>




From latta at snf.stanford.edu  Fri Jun 29 11:42:32 2007
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 29 Jun 2007 11:42:32 -0700
Subject: Problem tylan4 SNF 2007-06-29 11:42:31: door not shut
Message-ID: <mailman.301.1357938852.25973.tylan4-pcs@snf.stanford.edu>

The door is out about 6 inches...



From mdickey at snf.stanford.edu  Fri Jun 29 13:29:28 2007
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Fri, 29 Jun 2007 13:29:28 -0700
Subject: Problem tylan4 SNF 2007-06-29 11:42:31: door not shut
Message-ID: <mailman.302.1357938852.25973.tylan4-pcs@snf.stanford.edu>

Boated door back in. Running a boat in/out test