From rcordova at snf.stanford.edu Thu Nov 1 07:19:15 2007 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Thu, 1 Nov 2007 07:19:15 -0700 Subject: Comment tylan4 SNF 2007-11-01 07:19:15: Boat speed for Dry850 recipe Message-ID: Please check the boat speed for Dry850, it is at a snails pace and takes a very long time to boat in/out. Thanks Rosie Cordova From latta at snf.stanford.edu Thu Nov 1 13:32:40 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 1 Nov 2007 13:32:40 -0700 Subject: Problem tylan4 SNF 2007-11-01 13:32:40: Boat out is very sllloooow Message-ID: Boat in is a bit fast but still slow. It is not the recipe- all four ox furnaces were run at the same time with the same recipe.... From seymour at snf.stanford.edu Fri Nov 2 08:45:57 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 2 Nov 2007 08:45:57 -0700 Subject: Comment tylan4 SNF 2007-11-01 07:19:15: Boat speed for Dry850 recipe Message-ID: adjusted speed control pot From seymour at snf.stanford.edu Fri Nov 2 08:48:02 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 2 Nov 2007 08:48:02 -0700 Subject: Problem tylan4 SNF 2007-11-01 13:32:40: Boat out is very sllloooow Message-ID: boat spead is now bueaaaatiful as I adjusted the spead controal pot and checked operation on the tube. From latta at snf.stanford.edu Fri Nov 2 09:52:45 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Nov 2007 09:52:45 -0700 Subject: Comment tylan4 SNF 2007-11-02 09:52:45: Nov Process Quals Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 993A (expect about 1000A) Within-a-wafer = 0.6% (expect less than 5%) Wafer-to-wafer = 0.3% (expect less than 5%) From latta at snf.stanford.edu Fri Nov 2 09:52:58 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Nov 2007 09:52:58 -0700 Subject: Comment tylan4 SNF 2007-10-04 10:55:54: Oct process quals- god Message-ID: to the archives....