Comment tylan4 SNF 2007-11-02 09:52:45: Nov Process Quals
latta at snf.stanford.edu
latta at snf.stanford.edu
Fri Nov 2 09:52:45 PDT 2007
WET900 00:39:00 50 wafer spread
Average all wafers = 993A (expect about 1000A)
Within-a-wafer = 0.6% (expect less than 5%)
Wafer-to-wafer = 0.3% (expect less than 5%)
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