From latta at snf.stanford.edu  Wed Apr  2 16:05:17 2008
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 2 Apr 2008 16:05:17 -0700
Subject: Comment tylan4 SNF 2008-04-02 16:05:16: April process quals
Message-ID: <mailman.352.1357938853.25973.tylan4-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
Average all wafers = 1007A  (expect about 1000A)
Within-a-wafer = 0.5%  (expect less than 5%)
Wafer-to-wafer = 0.3% (expect less than 5%)



From latta at snf.stanford.edu  Wed Apr  2 16:05:30 2008
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 2 Apr 2008 16:05:30 -0700
Subject: Comment tylan4 SNF 2008-03-11 16:26:37: Mar process quals
Message-ID: <mailman.353.1357938853.25973.tylan4-pcs@snf.stanford.edu>

new quals posted



From latta at snf.stanford.edu  Thu Apr 24 11:21:57 2008
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 24 Apr 2008 11:21:57 -0700
Subject: Shutdown tylan4 SNF 2008-04-24 11:21:57: Flaking causing particles on wafers
Message-ID: <mailman.354.1357938853.25973.tylan4-pcs@snf.stanford.edu>

Not sure what is going on with the furnace.  Appears as though one of the quartz boats is flaking (not sure why, contaminate?).  The boat is presently located in the front of the tube.  The shealths where is was located is flaking too.  This caused particles on rcordova's wafers.
Additionally, the mixing chamber needs replacement- canter is breaking down....



From tberg at snf.stanford.edu  Thu Apr 24 13:51:39 2008
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 24 Apr 2008 13:51:39 -0700
Subject: Comment tylan4 SNF 2008-04-24 13:51:39: Cooling to change sheaths and boats
Message-ID: <mailman.355.1357938853.25973.tylan4-pcs@snf.stanford.edu>




From tberg at snf.stanford.edu  Fri Apr 25 08:46:53 2008
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Fri, 25 Apr 2008 08:46:53 -0700
Subject: Comment tylan4 SNF 2008-04-25 08:46:53: Replaced Quartz
Message-ID: <mailman.356.1357938853.25973.tylan4-pcs@snf.stanford.edu>

Replaced Quartz will do TLC clean after heat up



From seymour at snf.stanford.edu  Fri Apr 25 09:17:31 2008
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 25 Apr 2008 09:17:31 -0700
Subject: Comment tylan4 SNF 2008-04-25 09:17:31: started tlcclean
Message-ID: <mailman.357.1357938853.25973.tylan4-pcs@snf.stanford.edu>




From latta at snf.stanford.edu  Tue Apr 29 09:58:05 2008
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 29 Apr 2008 09:58:05 -0700
Subject: Shutdown tylan4 SNF 2008-04-24 11:21:57: Flaking causing particles on wafers
Message-ID: <mailman.358.1357938853.25973.tylan4-pcs@snf.stanford.edu>

Quartzware changed out.



From latta at snf.stanford.edu  Tue Apr 29 09:58:24 2008
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 29 Apr 2008 09:58:24 -0700
Subject: Comment tylan4 SNF 2008-04-25 09:17:31: started tlcclean
Message-ID: <mailman.359.1357938853.25973.tylan4-pcs@snf.stanford.edu>

and it finished...



From munehiro at snf.stanford.edu  Tue Apr 29 13:59:45 2008
From: munehiro at snf.stanford.edu (munehiro at snf.stanford.edu)
Date: Tue, 29 Apr 2008 13:59:45 -0700
Subject: Shutdown tylan4 SNF 2008-04-29 13:59:45: motor problem
Message-ID: <mailman.360.1357938853.25973.tylan4-pcs@snf.stanford.edu>

Boat  was not unloaded. 



From mdickey at snf.stanford.edu  Wed Apr 30 06:13:30 2008
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Wed, 30 Apr 2008 06:13:30 -0700
Subject: Shutdown tylan4 SNF 2008-04-29 13:59:45: motor problem
Message-ID: <mailman.361.1357938853.25973.tylan4-pcs@snf.stanford.edu>

Boat flag needed adjusting. Boat in and out fine now.