From latta at snf.stanford.edu  Thu Jul 10 13:30:50 2008
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 10 Jul 2008 13:30:50 -0700
Subject: Comment tylan4 SNF 2008-07-10 13:30:50: July Process Quals
Message-ID: <mailman.384.1357938853.25973.tylan4-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
Average all wafers = 992A  (expect about 1000A)
Within-a-wafer = 0.6%  (expect less than 5%)
Wafer-to-wafer = 0.03% (expect less than 5%)



From latta at snf.stanford.edu  Thu Jul 10 13:31:08 2008
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 10 Jul 2008 13:31:08 -0700
Subject: Comment tylan4 SNF 2008-06-18 14:47:27: June Process Quals
Message-ID: <mailman.385.1357938853.25973.tylan4-pcs@snf.stanford.edu>

new quals posted



From xhlim at snf.stanford.edu  Sat Jul 12 17:58:10 2008
From: xhlim at snf.stanford.edu (xhlim at snf.stanford.edu)
Date: Sat, 12 Jul 2008 17:58:10 -0700
Subject: Problem tylan4 SNF 2008-07-12 17:58:08: Power glitch
Message-ID: <mailman.386.1357938853.25973.tylan4-pcs@snf.stanford.edu>

I have my 4 wafers in Tylan 4 but I can't get them out. I left an empty wafer box beside it. Please put my wafers into the box in the order it was in the furnace tube. Thank you very much. 



From seymour at snf.stanford.edu  Thu Jul 17 07:44:32 2008
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Thu, 17 Jul 2008 07:44:32 -0700
Subject: Problem tylan4 SNF 2008-07-12 17:58:08: Power glitch
Message-ID: <mailman.387.1357938853.25973.tylan4-pcs@snf.stanford.edu>

furnace workiing correctly at6 this time.



From rcordova at snf.stanford.edu  Fri Jul 18 14:48:05 2008
From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu)
Date: Fri, 18 Jul 2008 14:48:05 -0700
Subject: Problem tylan4 SNF 2008-07-18 14:48:04: Front door of Tylan 4:
Message-ID: <mailman.388.1357938853.25973.tylan4-pcs@snf.stanford.edu>

The silicone gasket/o-ring in the door is deteriorating badly, leaving a crumbled mess under the door opening.  I am not sure if this is causing contamination issues, but it can't be all good.



From seymour at snf.stanford.edu  Mon Jul 21 15:43:28 2008
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mon, 21 Jul 2008 15:43:28 -0700
Subject: Problem tylan4 SNF 2008-07-18 14:48:04: Front door of Tylan 4:
Message-ID: <mailman.389.1357938853.25973.tylan4-pcs@snf.stanford.edu>

ded trans LC clean and pushed run.