Problem tylan4 SNF 2008-07-12 17:58:08: Power glitch

xhlim at snf.stanford.edu xhlim at snf.stanford.edu
Sat Jul 12 17:58:10 PDT 2008


I have my 4 wafers in Tylan 4 but I can't get them out. I left an empty wafer box beside it. Please put my wafers into the box in the order it was in the furnace tube. Thank you very much. 




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