From rcordova at snf.stanford.edu Sun Jun 1 13:55:29 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Sun, 1 Jun 2008 13:55:29 -0700 Subject: Comment tylan4 SNF 2008-06-01 13:55:28: Tox for wet100 Message-ID: time:02:40:00 TOX from back: 10,712a-----10,817a across 75 wafers. Uniformity is great and thickness is back to normal for my dep. Thanks Mike Dickey!!! From rcordova at snf.stanford.edu Sun Jun 1 21:21:16 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Sun, 1 Jun 2008 21:21:16 -0700 Subject: Problem tylan4 SNF 2008-06-01 21:21:16: CRC error seen when loading recipe Message-ID: "CRC error" seen when trying to download recipe Wet1100 this orning. Unloaded disk several times with same results. After several tries, download was successful. I did not try any other disk. From seymour at snf.stanford.edu Mon Jun 2 10:16:48 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 2 Jun 2008 10:16:48 -0700 Subject: Problem tylan4 SNF 2008-06-01 21:21:16: CRC error seen when loading recipe Message-ID: the wet recipe disk had a read error intermittenly. I replaced the disk with another. From seymour at snf.stanford.edu Thu Jun 5 08:38:47 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 5 Jun 2008 08:38:47 -0700 Subject: Comment tylan4 SNF 2008-06-05 08:38:46: checked TRANSLC and torch Message-ID: replaced both. Running TRASNSLC recipe. From latta at snf.stanford.edu Wed Jun 18 14:47:27 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 18 Jun 2008 14:47:27 -0700 Subject: Comment tylan4 SNF 2008-06-18 14:47:27: June Process Quals Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 1003A (expect about 1000A) Within-a-wafer = 0.6% (expect less than 5%) Wafer-to-wafer = 0.7% (expect less than 5%) From latta at snf.stanford.edu Wed Jun 18 14:47:59 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 18 Jun 2008 14:47:59 -0700 Subject: Comment tylan4 SNF 2008-05-06 16:31:37: May process quals Message-ID: new quals posted From latta at snf.stanford.edu Wed Jun 18 14:48:55 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 18 Jun 2008 14:48:55 -0700 Subject: Comment tylan4 SNF 2008-05-16 17:18:00: Wet1100 @ 3:20min. Message-ID: noted- good after door fix. From latta at snf.stanford.edu Wed Jun 18 14:49:54 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 18 Jun 2008 14:49:54 -0700 Subject: Comment tylan4 SNF 2008-05-19 07:33:40: Door Message-ID: noted From latta at snf.stanford.edu Wed Jun 18 14:50:24 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 18 Jun 2008 14:50:24 -0700 Subject: Comment tylan4 SNF 2008-06-01 13:55:28: Tox for wet100 Message-ID: nice note for the archive.... From latta at snf.stanford.edu Wed Jun 18 14:50:37 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 18 Jun 2008 14:50:37 -0700 Subject: Comment tylan4 SNF 2008-06-05 08:38:46: checked TRANSLC and torch Message-ID: noted... From rcordova at snf.stanford.edu Fri Jun 27 13:25:41 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Fri, 27 Jun 2008 13:25:41 -0700 Subject: Problem tylan4 SNF 2008-06-27 13:25:41: Door seal is totally falling apart! Message-ID: I pointed out to M Dickie this morning that the seal was deteriorating. As it opened just now, more of it crumbled off the quartz leaving a mess!! Thanks in advance for taking care of this. Rosie From seymour at snf.stanford.edu Fri Jun 27 14:35:58 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 27 Jun 2008 14:35:58 -0700 Subject: Problem tylan4 SNF 2008-06-27 13:25:41: Door seal is totally falling apart! Message-ID: Mike replaced sheath orings and reassembled door and installed it. I adjusted door flag tube is now ready to run.