Comment tylan4 SNF 2008-06-01 13:55:28: Tox for wet100

rcordova at snf.stanford.edu rcordova at snf.stanford.edu
Sun Jun 1 13:55:29 PDT 2008


time:02:40:00  TOX from back: 10,712a-----10,817a  across 75 wafers.  Uniformity is great and thickness is back to normal 
for my dep.  
Thanks Mike Dickey!!!




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