Comment tylan4 SNF 2008-06-18 14:47:27: June Process Quals

latta at snf.stanford.edu latta at snf.stanford.edu
Wed Jun 18 14:47:27 PDT 2008


WET900  00:39:00  50 wafer spread
Average all wafers = 1003A  (expect about 1000A)
Within-a-wafer = 0.6%  (expect less than 5%)
Wafer-to-wafer = 0.7% (expect less than 5%)




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