Problem tylan4 SNF 2008-09-04 10:49:42: This is from Friday 8/29 oxides:

rcordova at snf.stanford.edu rcordova at snf.stanford.edu
Thu Sep 4 10:49:42 PDT 2008


Nancy, I apologize for not entering this last week,  we see a drop in oxide uniformity thickness across 75 wafers.
Back of tube is: 10,459a center is:9,750a  front: 8,746a
We usually only see apprx: 500a variance from back to front, 
this is now 1700a from back to front.  
Recipe used: Wet1100 2:40:00




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