From latta at snf.stanford.edu  Fri Apr  3 09:58:17 2009
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 3 Apr 2009 09:58:17 -0700
Subject: Comment tylan4 SNF 2009-02-11 15:12:58: Feb Quals
Message-ID: <mailman.432.1357938854.25973.tylan4-pcs@snf.stanford.edu>

archived



From latta at snf.stanford.edu  Fri Apr  3 09:58:27 2009
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 3 Apr 2009 09:58:27 -0700
Subject: Comment tylan4 SNF 2009-03-18 10:20:30: TLCCLEAN last night
Message-ID: <mailman.433.1357938854.25973.tylan4-pcs@snf.stanford.edu>

archived



From latta at snf.stanford.edu  Fri Apr  3 17:17:57 2009
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 3 Apr 2009 17:17:57 -0700
Subject: Comment tylan4 SNF 2009-04-03 17:17:57: April quals
Message-ID: <mailman.434.1357938854.25973.tylan4-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
  (expect about 920A)
Front = 980A, Std Dev = 4.1
Back = 981A, Std Dev = 4.5
Average All = 981A



From latta at snf.stanford.edu  Fri Apr  3 17:18:09 2009
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 3 Apr 2009 17:18:09 -0700
Subject: Comment tylan4 SNF 2009-03-18 14:14:13: March Quals, ran 3/9/09
Message-ID: <mailman.435.1357938854.25973.tylan4-pcs@snf.stanford.edu>

archived



From ajamo at snf.stanford.edu  Tue Apr 14 21:33:54 2009
From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu)
Date: Tue, 14 Apr 2009 21:33:54 -0700
Subject: Comment tylan4 SNF 2009-04-14 21:33:54: DRY500
Message-ID: <mailman.436.1357938854.25973.tylan4-pcs@snf.stanford.edu>

This recipe (DRY500) does not load on Tylan 3 or 4.  I used DRY500A2 and entered in the extra variables for stabilization time and anneal tiime