From latta at snf.stanford.edu  Fri May  8 10:59:07 2009
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 8 May 2009 10:59:07 -0700
Subject: Comment tylan4 SNF 2009-05-08 10:59:06: May quals
Message-ID: <mailman.437.1357938854.25973.tylan4-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
  (expect about 920A)
Front = 978A, Std Dev = 3.6
Back = 972A, Std Dev = 5.1
Average All = 975A



From latta at snf.stanford.edu  Fri May  8 10:59:19 2009
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 8 May 2009 10:59:19 -0700
Subject: Comment tylan4 SNF 2009-04-03 17:17:57: April quals
Message-ID: <mailman.438.1357938854.25973.tylan4-pcs@snf.stanford.edu>

archived



From latta at snf.stanford.edu  Wed May 13 16:06:01 2009
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 13 May 2009 16:06:01 -0700
Subject: Problem tylan4 SNF 2009-05-13 16:06:00: MFS screwy
Message-ID: <mailman.439.1357938854.25973.tylan4-pcs@snf.stanford.edu>

 took a look at the gases on the tycom and they were showing an error message 80.  The flows were lower than set point for both O2 and H2.  Ray looked at the gas controller and it too is not right.  He will continue troubleshooting tomorrow.  For now, expect the oxidae growth to be not as expected.



From latta at snf.stanford.edu  Thu May 14 16:01:46 2009
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 14 May 2009 16:01:46 -0700
Subject: Comment tylan4 SNF 2009-05-14 16:01:46: May re-quals
Message-ID: <mailman.440.1357938854.25973.tylan4-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
  (expect about 920A)
Front = 982A, Std Dev = 3.8
Back = 986A, Std Dev = 5.2
Average All = 984A



From latta at snf.stanford.edu  Thu May 14 16:02:08 2009
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 14 May 2009 16:02:08 -0700
Subject: Problem tylan4 SNF 2009-05-13 16:06:00: MFS screwy
Message-ID: <mailman.441.1357938854.25973.tylan4-pcs@snf.stanford.edu>

re-qual'd and it looks good



From latta at snf.stanford.edu  Thu May 14 16:02:20 2009
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 14 May 2009 16:02:20 -0700
Subject: Comment tylan4 SNF 2009-04-14 21:33:54: DRY500
Message-ID: <mailman.442.1357938854.25973.tylan4-pcs@snf.stanford.edu>




From latta at snf.stanford.edu  Thu May 14 16:02:58 2009
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 14 May 2009 16:02:58 -0700
Subject: Comment tylan4 SNF 2009-05-08 10:59:06: May quals
Message-ID: <mailman.443.1357938854.25973.tylan4-pcs@snf.stanford.edu>

re-qualed after gas flows observed to be low.  The quals look good