From latta at snf.stanford.edu Tue Aug 3 16:56:03 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 3 Aug 2010 16:56:03 -0700 Subject: Comment tylan4 SNF 2010-08-03 16:56:03: Aug quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 921A, Std Dev = 8.9 Back = 958A, Std Dev = 7.8 Average All = 940A From latta at snf.stanford.edu Tue Aug 3 16:56:13 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 3 Aug 2010 16:56:13 -0700 Subject: Comment tylan4 SNF 2010-07-02 10:02:36: July quals Message-ID: archived From seymour at snf.stanford.edu Mon Aug 16 15:06:33 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 16 Aug 2010 15:06:33 -0700 Subject: Problem tylan4 SNF 2010-08-16 15:06:32: N2 carrier and O2HI mfc showed flow when no flow on. Message-ID: MFC's had problems most likely due to power shutdown. I reset the power supply and then adjusted the zero's. I did an auto zero routine. all looks ok at this time. And I will monitor the tube for problems. From waqasm at snf.stanford.edu Mon Aug 16 15:37:33 2010 From: waqasm at snf.stanford.edu (waqasm at snf.stanford.edu) Date: Mon, 16 Aug 2010 15:37:33 -0700 Subject: Problem tylan4 SNF 2010-08-16 15:37:32: function 7 error Message-ID: got funtion 7 displayed during anneal run. From seymour at snf.stanford.edu Tue Aug 17 07:42:12 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 17 Aug 2010 07:42:12 -0700 Subject: Problem tylan4 SNF 2010-08-16 15:37:32: function 7 error Message-ID: looked at system and all looked ok. Ran the loaded 650AN for the 20 min Aneal cycle. I will now load a wet recipe to do a complete BOT on the system. From seymour at snf.stanford.edu Tue Aug 17 08:24:22 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 17 Aug 2010 08:24:22 -0700 Subject: Problem tylan4 SNF 2010-08-17 08:24:21: running WET800 for BOT Message-ID: From seymour at snf.stanford.edu Tue Aug 17 08:26:53 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 17 Aug 2010 08:26:53 -0700 Subject: Problem tylan4 SNF 2010-08-16 15:06:32: N2 carrier and O2HI mfc showed flow when no flow on. Message-ID: Reset powersupply and checked all mfc zeros. Ran 650AN for 20 mins this morning and all was ok. I am running wet800 at this time. From seymour at snf.stanford.edu Tue Aug 17 11:09:04 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 17 Aug 2010 11:09:04 -0700 Subject: Problem tylan4 SNF 2010-08-17 08:24:21: running WET800 for BOT Message-ID: wet 800 and 650AN both ran without errors and completed