From ryhuang at snf.stanford.edu Thu Feb 11 11:45:16 2010 From: ryhuang at snf.stanford.edu (ryhuang at snf.stanford.edu) Date: Thu, 11 Feb 2010 11:45:16 -0800 Subject: Shutdown tylan4 SNF 2010-02-11 11:45:16: tcu fault Message-ID: Tried running dry650 recipe and got a TCU fault immediately. Hit Alarm Ack and tried running again, but the furnace did not unload. From seymour at snf.stanford.edu Thu Feb 11 11:57:44 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 11 Feb 2010 11:57:44 -0800 Subject: Shutdown tylan4 SNF 2010-02-11 11:45:16: tcu fault Message-ID: found door flag past first sensor not allowing tube to open as loader didn't kinow where it was. I did not find any TCU errors, tube was at approx. 600 degrees. From gunjim at snf.stanford.edu Fri Feb 12 12:40:26 2010 From: gunjim at snf.stanford.edu (gunjim at snf.stanford.edu) Date: Fri, 12 Feb 2010 12:40:26 -0800 Subject: Comment tylan4 SNF 2010-02-12 12:40:26: Function7 warning Message-ID: I noticed after my run finished. No alarm. From latta at snf.stanford.edu Tue Feb 16 16:25:46 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 16 Feb 2010 16:25:46 -0800 Subject: Comment tylan4 SNF 2010-02-12 12:40:26: Function7 warning Message-ID: archived From latta at snf.stanford.edu Tue Feb 16 16:27:44 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 16 Feb 2010 16:27:44 -0800 Subject: Comment tylan4 SNF 2010-02-16 16:27:44: Feb quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 941A, Std Dev = 8.8 Back = 969A, Std Dev = 7.4 Average All = 955A From latta at snf.stanford.edu Tue Feb 16 16:27:54 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 16 Feb 2010 16:27:54 -0800 Subject: Comment tylan4 SNF 2010-01-06 16:51:11: Jan quals Message-ID: archived From latta at snf.stanford.edu Wed Feb 17 11:39:20 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 17 Feb 2010 11:39:20 -0800 Subject: Problem tylan4 SNF 2010-02-17 11:39:19: readout at the panel Message-ID: is, well, freaky... From tberg at snf.stanford.edu Thu Feb 18 06:57:08 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 18 Feb 2010 06:57:08 -0800 Subject: Problem tylan4 SNF 2010-02-17 11:39:19: readout at the panel Message-ID: reseated display From gunjim at snf.stanford.edu Mon Feb 22 10:42:25 2010 From: gunjim at snf.stanford.edu (gunjim at snf.stanford.edu) Date: Mon, 22 Feb 2010 10:42:25 -0800 Subject: Problem tylan4 SNF 2010-02-22 10:42:25: No O2HI flow Message-ID: I am running low temperature oxidation (400C) and have noticed no O2HI flow during my oxidation step. N2 is flowing instead. Function 7 warning displayed. No alarms. Tylan2 also has the Function 7 warning. From seymour at snf.stanford.edu Mon Feb 22 11:38:35 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 22 Feb 2010 11:38:35 -0800 Subject: Problem tylan4 SNF 2010-02-22 10:42:25: No O2HI flow Message-ID: There is no function 7, the readout is saying function ? I put controller in manual and gave it a setpoint and O2HI flowed to setpoint. Unable to find any problems with the tube at this time as recipe not running. From seymour at snf.stanford.edu Mon Feb 22 11:40:28 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 22 Feb 2010 11:40:28 -0800 Subject: Comment tylan4 SNF 2010-02-22 11:40:28: user had O2Hi problem Message-ID: I checked out system and found no problems, but user was not around to ask about their problems with the tube. From gunjim at snf.stanford.edu Mon Feb 22 21:04:48 2010 From: gunjim at snf.stanford.edu (gunjim at snf.stanford.edu) Date: Mon, 22 Feb 2010 21:04:48 -0800 Subject: Comment tylan4 SNF 2010-02-22 21:04:48: O2HI flowing Message-ID: Test run 400C dry oxidation. O2HI flowed during the oxidation step. Thanks. From ajamo at snf.stanford.edu Sat Feb 27 09:48:51 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sat, 27 Feb 2010 09:48:51 -0800 Subject: Comment tylan4 SNF 2010-02-27 09:48:51: TLCCLEAN Message-ID: Starting Clean recipe TLCCLEAN @ 10AM