From latta at snf.stanford.edu  Wed Sep  1 15:24:46 2010
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 1 Sep 2010 15:24:46 -0700
Subject: Comment tylan4 SNF 2010-09-01 15:24:46: Sept quals
Message-ID: <mailman.520.1357938854.25973.tylan4-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
  (expect about 920A)
Front = 808A, Std Dev = 4.0
Back = 828A, Std Dev = 4.6
Average All = 818A
This oxide thickness is more than 10% less than the last qual. 



From latta at snf.stanford.edu  Wed Sep  1 15:24:58 2010
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 1 Sep 2010 15:24:58 -0700
Subject: Comment tylan4 SNF 2010-08-03 16:56:03: Aug quals
Message-ID: <mailman.521.1357938854.25973.tylan4-pcs@snf.stanford.edu>




From maurice at snf.stanford.edu  Fri Sep 10 14:46:48 2010
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Fri, 10 Sep 2010 14:46:48 -0700
Subject: Shutdown tylan4 SNF 2010-09-10 14:46:47: cable broken
Message-ID: <mailman.522.1357938854.25973.tylan4-pcs@snf.stanford.edu>

Cable on loader broken



From tberg at snf.stanford.edu  Mon Sep 13 06:37:22 2010
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 13 Sep 2010 06:37:22 -0700
Subject: Shutdown tylan4 SNF 2010-09-10 14:46:47: cable broken
Message-ID: <mailman.523.1357938854.25973.tylan4-pcs@snf.stanford.edu>

Replaced broken cable



From king at snf.stanford.edu  Thu Sep 23 00:20:04 2010
From: king at snf.stanford.edu (king at snf.stanford.edu)
Date: Thu, 23 Sep 2010 00:20:04 -0700
Subject: Problem tylan4 SNF 2010-09-23 00:20:03: Low oxidation rate 
Message-ID: <mailman.524.1357938854.25973.tylan4-pcs@snf.stanford.edu>

Expected over 5000A but only got 4295A.
Wet 1100, 38 min.
Thermcos give about 5050A
Tube 3 gave 4800A, same recipe/time.