From latta at snf.stanford.edu Fri Apr 1 16:16:49 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 1 Apr 2011 16:16:49 -0700 Subject: Problem tylan4 SNF 2011-04-01 16:16:48: April quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 1042A, Std Dev = 3.3 Back = 1030A, Std Dev = 4.1 Average All = 1036A From latta at snf.stanford.edu Fri Apr 1 16:17:02 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 1 Apr 2011 16:17:02 -0700 Subject: Comment tylan4 SNF 2011-03-03 13:43:32: Mar Quals Message-ID: newer quals posted From latta at snf.stanford.edu Thu Apr 7 16:56:44 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 7 Apr 2011 16:56:44 -0700 Subject: Comment tylan4 SNF 2011-04-07 16:56:44: April quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 1042A, Std Dev = 3.3 Back = 1030A, Std Dev = 4.1 Average All = 1036A From latta at snf.stanford.edu Thu Apr 7 16:57:08 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 7 Apr 2011 16:57:08 -0700 Subject: Problem tylan4 SNF 2011-04-01 16:16:48: April quals Message-ID: oppps- listed quals as problem instead of comment.... From bilee at snf.stanford.edu Mon Apr 11 02:37:19 2011 From: bilee at snf.stanford.edu (bilee at snf.stanford.edu) Date: Mon, 11 Apr 2011 02:37:19 -0700 Subject: Shutdown tylan4 SNF 2011-04-11 02:37:18: Boat does not go in Message-ID: Boat does not go in to the tube. System cannot be used. From seymour at snf.stanford.edu Mon Apr 11 07:41:03 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 11 Apr 2011 07:41:03 -0700 Subject: Shutdown tylan4 SNF 2011-04-11 02:37:18: Boat does not go in Message-ID: found loader out flagneeding adjustment. Loader hitting mechanical stop before loader out flag in sensor. Adjusted sensor flag and checked operation in auto to make sure all worked correctly. loader opened and stopped out position and when sent in closed and made door closed interlock. From audet at snf.stanford.edu Sun Apr 17 17:27:24 2011 From: audet at snf.stanford.edu (audet at snf.stanford.edu) Date: Sun, 17 Apr 2011 17:27:24 -0700 Subject: Problem tylan4 SNF 2011-04-17 17:27:23: MFS alarm Message-ID: From seymour at snf.stanford.edu Mon Apr 18 11:01:18 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 18 Apr 2011 11:01:18 -0700 Subject: Problem tylan4 SNF 2011-04-17 17:27:23: MFS alarm Message-ID: MFS alarm for N2 Carrier not aat zero. I found a small leak causing a reading of 118 mV on sensor. Removed sensor and control valve and cleaned sealing surfaces. reinstalled both and no flow indication with N2 Carrier off. Did a zero on all 4 MFS460 MFC's and did auto zero routine. All check good now. From latta at snf.stanford.edu Wed Apr 20 13:57:47 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 20 Apr 2011 13:57:47 -0700 Subject: Shutdown tylan4 SNF 2011-04-20 13:57:46: loader cable broken Message-ID: From seymour at snf.stanford.edu Wed Apr 20 14:23:31 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 20 Apr 2011 14:23:31 -0700 Subject: Shutdown tylan4 SNF 2011-04-20 13:57:46: loader cable broken Message-ID: replaced loader cable From maurice at snf.stanford.edu Wed Apr 20 15:14:01 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 20 Apr 2011 15:14:01 -0700 Subject: Comment tylan4 SNF 2011-04-20 15:14:01: created 450AN Message-ID: 450c anneal created From jparker at snf.stanford.edu Wed Apr 27 14:08:48 2011 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Wed, 27 Apr 2011 14:08:48 -0700 Subject: Problem tylan4 SNF 2011-04-27 14:08:47: Boat control "closed" not recognized Message-ID: When you load any new recipe, furnace makes a stuttering sound and cable vibrates. Maurice recognizes this as the tube not registering the boat is in and keeps trying to close it. Hit "Stop" on "Boat Control" in the lower left as soon as you load a new recipe to stop the stuttering if you need to use the tube. Also when you send the boat in during a recipe, you need to wait around to hit "Stop" on "Boat Control" as well. From jparker at snf.stanford.edu Thu Apr 28 08:41:19 2011 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Thu, 28 Apr 2011 08:41:19 -0700 Subject: Comment tylan4 SNF 2011-04-28 08:41:19: Followup on boat close issue Message-ID: When I loaded "800an" to get the tube back to a normal standby temp, the "stuttering" of the boat trying to close incorrectly didn't happen this morning. It happened yesterday while loading "400an" and "slow900o" only. From seymour at snf.stanford.edu Fri Apr 29 07:39:59 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 29 Apr 2011 07:39:59 -0700 Subject: Problem tylan4 SNF 2011-04-27 14:08:47: Boat control "closed" not recognized Message-ID: loaded wet800 and watched loader out and in. When flag entered out sensor loader stopped. and when flag entered load in sensor the slow push started and then timed out and stopped.