From tberg at snf.stanford.edu Mon Jan 3 06:10:51 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 3 Jan 2011 06:10:51 -0800 Subject: Shutdown tylan4 SNF 2010-12-16 07:47:13: for power down Message-ID: back up From maurice at snf.stanford.edu Mon Jan 3 16:16:15 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 3 Jan 2011 16:16:15 -0800 Subject: Problem tylan4 SNF 2011-01-03 16:16:14: qual test thin Message-ID: wet900 00:39:00 ~ 877 ang...thin...historically around 950Ang wafer 1 886,884,885,887,879,887,886,882,879 wafer 4 875,872,873,874,871,876,876,872,871 From maurice at snf.stanford.edu Mon Jan 3 17:01:35 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 3 Jan 2011 17:01:35 -0800 Subject: Comment tylan4 SNF 2011-01-03 17:01:35: running TLC Message-ID: From zpatel at snf.stanford.edu Wed Jan 5 10:24:15 2011 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Wed, 5 Jan 2011 10:24:15 -0800 Subject: Problem tylan4 SNF 2011-01-05 10:24:14: TLCVAR -no oxide Message-ID: Running TLCVAR (TLC clean with wafer) there is no oxide deposition. From shott at stanford.edu Wed Jan 5 10:36:41 2011 From: shott at stanford.edu (John Shott) Date: Wed, 05 Jan 2011 10:36:41 -0800 Subject: Problem tylan4 SNF 2011-01-05 10:24:14: TLCVAR -no oxide In-Reply-To: <20110105182415.1DE07456266@smtp-unencrypted.stanford.edu> References: <20110105182415.1DE07456266@smtp-unencrypted.stanford.edu> Message-ID: <4D24BA39.8040501@stanford.edu> Zubin: This is not an equipment problem .... the tool was not enabled and no gases other than nitrogen will flow unless the tool is enabled. Maurice, was a message to this effect sent out? Thanks, John From maurice at snf.stanford.edu Thu Jan 6 14:45:02 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 6 Jan 2011 14:45:02 -0800 Subject: Comment tylan4 SNF 2011-01-06 14:45:01: running test Message-ID: zpatel reports a no oxide when running TLCVAR program. We will run our standard wet900 for 00:39:00 to see if there is a tube issue or a program issue. From shott at snf.stanford.edu Thu Jan 6 15:13:26 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Thu, 6 Jan 2011 15:13:26 -0800 Subject: Comment tylan4 SNF 2011-01-06 15:13:25: Observations during Maurice's test run .... Message-ID: While Maurice was running a test run of WET900, I took a look at both the flow controller and DI ST 4 to make sure that oxygen and hydrogen were flowing. At about 3 minutes into what I believe is a 30 minute wet cycle (STEP 25) the flow controller was reading an oxygen flow of 1005 SCCM of oxygen and 1508 of hydrogen. DI ST 4 shoed the same oxygen flow reading and a H2/O2 ratio of 150.0. Also, the temperature of the load, center and source TC was 900.3, 900.1, and 914.5 with power levels of 92.10, 10.64, and 0.00, respectively that indicates that the torch is on and heating the source end. Oh yes, DNTLK showed ON, as it should for this tool. These would all tend to confirm that both oxygen and hydrogen are flowing and I would predict that we get oxide growth. If that is the case, however, it still does not answer what happened to Zubin's run ... so thay well take further investigation. Thanks, John From maurice at snf.stanford.edu Thu Jan 6 16:24:02 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 6 Jan 2011 16:24:02 -0800 Subject: Shutdown tylan4 SNF 2011-01-06 16:24:02: Wet ox test bad Message-ID: Ran wet900 00:39:00 expected ~850 (Monday it was 850) Actual 651 Ang From latta at snf.stanford.edu Thu Jan 6 17:03:03 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 6 Jan 2011 17:03:03 -0800 Subject: Problem tylan4 SNF 2011-01-06 17:03:03: Another tidbit to add to shutdown.... Message-ID: If you look at the tube end surface there appears to be a chip or a flake of the build-up towards the top. THere has been a fair bit of TLC run through the tube recently and that may account for the 'goopy' appearance of the door assembly. Bad door seal? From shott at stanford.edu Thu Jan 6 17:49:44 2011 From: shott at stanford.edu (John Shott) Date: Thu, 06 Jan 2011 17:49:44 -0800 Subject: Shutdown tylan4 SNF 2011-01-06 16:24:02: Wet ox test bad In-Reply-To: <20110107002402.7A5204240@smtp-unencrypted.stanford.edu> References: <20110107002402.7A5204240@smtp-unencrypted.stanford.edu> Message-ID: <4D267138.5060702@stanford.edu> Maurice: Is step 25 the growth step? If so, when I looked at it, the sum of elapsed time and remaining time was 30, not 39 ... In other words, when I looked at it while I can't exactly remember what the fields were called (they were on the right side of DI ST 4 and they were something like 01:50 and 28:10 that totaled 30:00. If that was supposed to be 39:00, can that be indicative of either a keyboard problem or a typo? Thanks, John From maurice at snf.stanford.edu Fri Jan 7 08:55:19 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 7 Jan 2011 08:55:19 -0800 Subject: Comment tylan4 SNF 2011-01-07 08:55:19: wet900 test Message-ID: 00:39:00 From latta at snf.stanford.edu Fri Jan 7 11:41:57 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 7 Jan 2011 11:41:57 -0800 Subject: Comment tylan4 SNF 2011-01-07 11:41:56: Results for Qual test (WET900, 39 min) Message-ID: Front wafer (4-1) = 793A, std dev = 5.9 Back wafer (4-4) = 793A, std dev = 3.8 From maurice at snf.stanford.edu Fri Jan 7 17:21:52 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 7 Jan 2011 17:21:52 -0800 Subject: Shutdown tylan4 SNF 2011-01-06 16:24:02: Wet ox test bad Message-ID: yellow lighting for the weeked From maurice at snf.stanford.edu Fri Jan 7 17:24:22 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 7 Jan 2011 17:24:22 -0800 Subject: Problem tylan4 SNF 2011-01-07 17:24:22: Wet ox thin Message-ID: Ran wet900 00:39:00 expected 850 ang (historically it has been ~950) Front wafer (4-1) = 793A, std dev = 5.9 Back wafer (4-4) = 793A, std dev = 3.8 Yellow for the weekend. From seymour at snf.stanford.edu Mon Jan 10 13:57:59 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 10 Jan 2011 13:57:59 -0800 Subject: Shutdown tylan4 SNF 2011-01-10 13:57:58: cooling dowen for a pull Message-ID: there is a chip out of the front of the tube. From tberg at snf.stanford.edu Tue Jan 11 07:34:57 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 11 Jan 2011 07:34:57 -0800 Subject: Comment tylan4 SNF 2011-01-11 07:34:56: element is bad-preparing to change Message-ID: From seymour at snf.stanford.edu Wed Jan 12 14:43:01 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 12 Jan 2011 14:43:01 -0800 Subject: Shutdown tylan4 SNF 2011-01-10 13:57:58: cooling dowen for a pull Message-ID: element replaced, new tube installed. Loader guartz cleaned and reassembled. element power on. Loaded tlcclean and started. Test needed when done. From seymour at snf.stanford.edu Wed Jan 12 14:43:49 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 12 Jan 2011 14:43:49 -0800 Subject: Problem tylan4 SNF 2011-01-12 14:43:49: will need test after repair. Message-ID: From seymour at snf.stanford.edu Thu Jan 13 14:28:49 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 13 Jan 2011 14:28:49 -0800 Subject: Shutdown tylan4 SNF 2011-01-13 14:28:49: door will not open. Message-ID: tube position moved back allowing tube door to go in past first flag. The positioning device failed and I will nood to cool down the tube and remove the rear panel and resecure tube. From maurice at snf.stanford.edu Thu Jan 13 14:41:05 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 13 Jan 2011 14:41:05 -0800 Subject: Comment tylan4 SNF 2011-01-13 14:41:03: qual test 1/13/11 Message-ID: Qual after tube pull wet900 00:39:00 ~ 822 ang...thin...historically around 950Ang wafer 1 842,840,836,831,828,841,840,837,836 wafer 4 809,809,808,802,797,809,801,803,803 From maurice at snf.stanford.edu Thu Jan 13 14:48:17 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 13 Jan 2011 14:48:17 -0800 Subject: Comment tylan4 SNF 2011-01-13 14:48:15: dry1000 test Message-ID: dry1000 01:00:00 2 wafers 50 slots apart Expected thickness fron online calc 512Ang - front wafer Avg 524 Ang back wafer Avg 514 - This is pretty close to the expected value. The same test on Tylan3 today gave 539 Ang. So Tyaln 3 and 4 are close on dry ox but Tylan 4 is lower than the other three tubes for wet oxides. From maurice at snf.stanford.edu Thu Jan 13 14:50:58 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 13 Jan 2011 14:50:58 -0800 Subject: Problem tylan4 SNF 2011-01-12 14:43:49: will need test after repair. Message-ID: test complete see 1/13/11 test qual post on coral From maurice at snf.stanford.edu Thu Jan 13 14:51:17 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 13 Jan 2011 14:51:17 -0800 Subject: Comment tylan4 SNF 2011-01-11 07:34:56: element is bad-preparing to change Message-ID: element replaced From seymour at snf.stanford.edu Fri Jan 14 13:57:09 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 14 Jan 2011 13:57:09 -0800 Subject: Shutdown tylan4 SNF 2011-01-13 14:28:49: door will not open. Message-ID: adjusted door position and checcked operation. door will open now. From seymour at snf.stanford.edu Fri Jan 14 13:57:53 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 14 Jan 2011 13:57:53 -0800 Subject: Comment tylan4 SNF 2011-01-14 13:57:53: needs another test after door closure fix Message-ID: From maurice at snf.stanford.edu Fri Jan 14 16:56:04 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 14 Jan 2011 16:56:04 -0800 Subject: Comment tylan4 SNF 2011-01-14 13:57:53: needs another test after door closure fix Message-ID: Test complete wet900 00:39:00 - wafer1 avg = 851 ang wafer2 avg = 841 ang From seymour at snf.stanford.edu Thu Jan 20 12:11:46 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 20 Jan 2011 12:11:46 -0800 Subject: Comment tylan4 SNF 2011-01-20 12:11:46: checked and adjusted MFC flows Message-ID: found the O2 and H2 flows needed correction. adjusted for flow to match setpoint. needs testing. From maurice at snf.stanford.edu Thu Jan 20 16:44:16 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 20 Jan 2011 16:44:16 -0800 Subject: Comment tylan4 SNF 2011-01-20 16:44:15: qual after H2/O2 adjusted Message-ID: qual after H2/O2 adjusted wet900 00:39:00 ~ 855 ang...thin...historically around 950Ang - wafer 1 872,867,862,855,853,869,864,864,864 wafer 4 861,858,853,848,844,854,853,856,858 From seymour at snf.stanford.edu Fri Jan 21 07:43:47 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 21 Jan 2011 07:43:47 -0800 Subject: Comment tylan4 SNF 2011-01-21 07:43:46: running T/C calibration program Message-ID: From maurice at snf.stanford.edu Mon Jan 24 12:01:34 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 24 Jan 2011 12:01:34 -0800 Subject: Comment tylan4 SNF 2011-01-24 12:01:34: qual after temp cal Message-ID: qual after temp cal wet900 00:39:00 thin...historically around 950Ang - wafer 1 886,874,871,862,859,874,872,871,868 wafer 4 868,865,859,854,850,865,862,859,857