From latta at snf.stanford.edu Thu May 5 14:51:13 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 5 May 2011 14:51:13 -0700 Subject: Comment tylan4 SNF 2011-05-05 14:51:12: May Quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 1056A, Std Dev = 3.3 Back = 1044A, Std Dev = 4.4 Average All = 1050A From latta at snf.stanford.edu Thu May 5 14:51:23 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 5 May 2011 14:51:23 -0700 Subject: Comment tylan4 SNF 2011-04-07 16:56:44: April quals Message-ID: archived From latta at snf.stanford.edu Thu May 5 14:51:45 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 5 May 2011 14:51:45 -0700 Subject: Comment tylan4 SNF 2011-04-20 15:14:01: created 450AN Message-ID: and we thank you for it From latta at snf.stanford.edu Thu May 5 14:52:11 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 5 May 2011 14:52:11 -0700 Subject: Comment tylan4 SNF 2011-04-28 08:41:19: Followup on boat close issue Message-ID: loader working fine now From jparker at snf.stanford.edu Tue May 10 14:15:28 2011 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 10 May 2011 14:15:28 -0700 Subject: Problem tylan4 SNF 2011-05-10 14:15:27: Boat out nonfunctioning Message-ID: Loaded my recipe and hit Run, but tube doesn't come out. From jparker at snf.stanford.edu Tue May 10 14:23:31 2011 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 10 May 2011 14:23:31 -0700 Subject: Shutdown tylan4 SNF 2011-05-10 14:23:30: Boat out nonfunctioning Message-ID: Consulted Nancy and she recommended red lighting (there's no workaround). Same problem as previous statement---boat out does not occur upon Run. From tberg at snf.stanford.edu Wed May 11 07:16:25 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 11 May 2011 07:16:25 -0700 Subject: Comment tylan4 SNF 2011-05-11 07:16:25: Waiting for Boat loader power supply Message-ID: From seymour at snf.stanford.edu Mon May 16 11:32:08 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 16 May 2011 11:32:08 -0700 Subject: Shutdown tylan4 SNF 2011-05-10 14:23:30: Boat out nonfunctioning Message-ID: replaced loader power supply. checked operation in manual and auto From seymour at snf.stanford.edu Mon May 16 11:33:11 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 16 May 2011 11:33:11 -0700 Subject: Problem tylan4 SNF 2011-05-10 14:15:27: Boat out nonfunctioning Message-ID: boat loader power supply replaced From tberg at snf.stanford.edu Mon May 16 11:52:39 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 16 May 2011 11:52:39 -0700 Subject: Problem tylan4 SNF 2011-05-16 11:52:39: front panel stus display not correct Message-ID: front panel stus display not correct. Tycom shows correct status and system is functional From tberg at snf.stanford.edu Mon May 16 13:06:58 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 16 May 2011 13:06:58 -0700 Subject: Problem tylan4 SNF 2011-05-16 11:52:39: front panel stus display not correct Message-ID: Reset slave CPU and loaded wet800. Front display now functional From tberg at snf.stanford.edu Tue May 17 13:39:36 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 17 May 2011 13:39:36 -0700 Subject: Comment tylan4 SNF 2011-05-17 13:39:36: AMAT working on Software Message-ID: From tberg at snf.stanford.edu Tue May 17 13:43:52 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 17 May 2011 13:43:52 -0700 Subject: Comment tylan4 SNF 2011-05-17 13:39:36: AMAT working on Software Message-ID: wrong tube From jparker at snf.stanford.edu Tue May 17 18:57:27 2011 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 17 May 2011 18:57:27 -0700 Subject: Shutdown tylan4 SNF 2011-05-17 18:57:26: MFC alarm Message-ID: Got "MFC alarm" partway through process twice in a row. Ray knows whats up (he caught and restarted the first time). Left furnace idling at 400 C (idle temp of my recipe) in case colder is more useful during the fix. Last recipe aborted prior to shutdown. From seymour at snf.stanford.edu Wed May 18 07:53:35 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 18 May 2011 07:53:35 -0700 Subject: Shutdown tylan4 SNF 2011-05-17 18:57:26: MFC alarm Message-ID: checked all door interlock connections, found faulty one on loader board back mplane plug. door interlock now on when door closed