From seymour at snf.stanford.edu Thu Sep 1 14:27:03 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 1 Sep 2011 14:27:03 -0700 Subject: Shutdown tylan4 SNF 2011-09-01 14:27:02: N2 mfc error alarms Message-ID: From latta at snf.stanford.edu Thu Sep 1 16:14:04 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 1 Sep 2011 16:14:04 -0700 Subject: Comment tylan4 SNF 2011-09-01 16:14:03: Sept quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 1048A, Std Dev = 4.2 Back = 1035A, Std Dev = 4.6 Average All = 1042A From latta at snf.stanford.edu Thu Sep 1 16:14:14 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 1 Sep 2011 16:14:14 -0700 Subject: Comment tylan4 SNF 2011-08-05 17:19:59: Aug quals Message-ID: archived From seymour at snf.stanford.edu Fri Sep 2 10:58:49 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 2 Sep 2011 10:58:49 -0700 Subject: Shutdown tylan4 SNF 2011-09-01 14:27:02: N2 mfc error alarms Message-ID: replaced Ne sensor. Checked all MFC zeros and ran the auto zero routine. From kcbalram at snf.stanford.edu Mon Sep 5 00:57:23 2011 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Mon, 5 Sep 2011 00:57:23 -0700 Subject: Problem tylan4 SNF 2011-09-05 00:57:22: MFS alarm Message-ID: Wet oxidation (WETOX 1000) did not go through. Krishna From seymour at snf.stanford.edu Wed Sep 7 11:57:11 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 7 Sep 2011 11:57:11 -0700 Subject: Problem tylan4 SNF 2011-09-05 00:57:22: MFS alarm Message-ID: I checked out O2 and H2 flows and they looked good. I ren WET800 and both gases came up to setpoint and stayed on during the wet ox time. Perhaps the tube wasn't enabled From nharjee at snf.stanford.edu Sun Sep 25 16:37:50 2011 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Sun, 25 Sep 2011 16:37:50 -0700 Subject: Problem tylan4 SNF 2011-09-25 16:37:50: MFS Alarm Message-ID: O2HIGH leak being reported in the service chase. From seymour at snf.stanford.edu Mon Sep 26 09:00:30 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 26 Sep 2011 09:00:30 -0700 Subject: Problem tylan4 SNF 2011-09-25 16:37:50: MFS Alarm Message-ID: I adjusted the drifted zero on channel three, the MFC for O2HI. I indicated 9cc of flow with none flowing. Drift is very common for these MONO BLOCK flow controllers. From seymour at snf.stanford.edu Wed Sep 28 10:02:23 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 28 Sep 2011 10:02:23 -0700 Subject: Shutdown tylan4 SNF 2011-09-28 10:02:22: TCU controller not working correctly Message-ID: From seymour at snf.stanford.edu Wed Sep 28 11:58:00 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 28 Sep 2011 11:58:00 -0700 Subject: Shutdown tylan4 SNF 2011-09-28 11:58:00: replaced TCU board Message-ID: edited t/c offsets and started backup t/c calibration routine From seymour at snf.stanford.edu Thu Sep 29 15:08:21 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 29 Sep 2011 15:08:21 -0700 Subject: Shutdown tylan4 SNF 2011-09-28 10:02:22: TCU controller not working correctly Message-ID: replaced TCU board. From seymour at snf.stanford.edu Thu Sep 29 15:08:50 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 29 Sep 2011 15:08:50 -0700 Subject: Shutdown tylan4 SNF 2011-09-28 11:58:00: replaced TCU board Message-ID: backup t/c cal completed. tube is up