From latta at snf.stanford.edu  Tue Nov  5 10:22:11 2002
From: latta at snf.stanford.edu (Nancy Latta)
Date: Tue, 05 Nov 2002 10:22:11 -0800
Subject: Tylan4 up and running!
Message-ID: <3DC80C52.96E6A84@snf.stanford.edu>

Folks,

After extensive testing, re-adjusting and general noodling on tylan4 it
is offically released to lab members for both wet and dry oxidations.

It should be noted, however, that we are leaving it on a 'yellow'
condition.  This is because the uniformity of the thickness of the wet
oxidations across a wafer is about 5%.  We expect about 1-2%.

There is a good chance that the uniformity will improve with use of the
tube.  When and if that occurs we will take the furnace out of Condition
Yellow.

If you have any questions or concerns, please grab a Team Furnace member
and chat.  We are Dick, Mary, Ted, Ray, Mike Dickey, Maurice and Nancy.

Thanks you for your patience though out this repair.

-- 
Nancy Latta
Stanford Nanofabrication Facility
CIS Room 145 
420 Via Palou Mall
Stanford, CA 94305-4070
(650) 725-6727
latta at snf.stanford.edu


From latta at snf.stanford.edu  Thu Nov 21 10:56:40 2002
From: latta at snf.stanford.edu (Nancy Latta)
Date: Thu, 21 Nov 2002 10:56:40 -0800
Subject: Wet Ox uniformity issues
Message-ID: <3DDD2C68.DFCBBBF9@snf.stanford.edu>

Folks,

As some of you might know, we have be tracking down wet oxidation
non-uniformity in tylan4.  All the data is in the equipment archinve for
tylan4 on line, but the quick summary is that wafer-to-wafer uniformity
has been as bad as 30% with within-a-wafer uniformity at about 22%.

Earlier this week two tests revealed the uniformity has drastically
improved to 4% wafer-to-wafer and 2% within-a-wafer.  Based on these
results we are sending out this message to warn users of tylan4 about
possible inconsistencies affecting wet oxidations in this tube.  

Dry oxidations are fine.

If you choose to use this furnace for wet oxides and notice gross
non-uniformities please let us know.  Our efforts to chase this problem
down have led to more puzzlement than enlightenment.

Thanks for your attention to this,

				Team Furnace
-- 
Nancy Latta
Stanford Nanofabrication Facility
CIS Room 145 
420 Via Palou Mall
Stanford, CA 94305-4070
(650) 725-6727
latta at snf.stanford.edu