From seymour at snf.stanford.edu Thu Jan 10 07:55:51 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jan 10, 2002 7:55:51 AM Subject: Shutdown tylan5 2001-11-14 17:30:30: Breaking wafers!. Message-ID: Mike D adjusted the loader position in the tube and checked the operation. From seymour at snf.stanford.edu Mon Jan 14 09:21:18 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jan 14, 2002 9:21:18 AM Subject: Shutdown tylan5 2002-01-14 09:21:14: MFS controller problem, tube is down Message-ID: