From tberg at snf.stanford.edu Wed Nov 8 09:39:39 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 8 Nov 2006 09:39:39 -0800 Subject: Problem tylan5 SNF 2006-09-08 16:55:47: Check controller temp Message-ID: Repaired controller From maurice at snf.stanford.edu Wed Nov 15 15:09:46 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 15 Nov 2006 15:09:46 -0800 Subject: Shutdown tylan5 SNF 2006-11-15 15:09:46: MFC alarm/ N2 carrier Message-ID: User reported alarm and non uniformity on wafers From maurice at snf.stanford.edu Wed Nov 15 17:13:41 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 15 Nov 2006 17:13:41 -0800 Subject: Comment tylan5 SNF 2006-11-15 17:13:41: controller turned off Message-ID: N2 carrier alarm...constantly controller turned off as per Ted From mdickey at snf.stanford.edu Thu Nov 16 08:38:49 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 16 Nov 2006 08:38:49 -0800 Subject: Comment tylan5 SNF 2006-11-16 08:38:48: Adjustment Message-ID: Adjusted N2 carrier and N2 pots From mdickey at snf.stanford.edu Thu Nov 16 10:22:37 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 16 Nov 2006 10:22:37 -0800 Subject: Shutdown tylan5 SNF 2006-11-15 15:09:46: MFC alarm/ N2 carrier Message-ID: Adjusted N2 and N2 carrier pots...ready for use From seymour at snf.stanford.edu Thu Nov 16 15:38:32 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 16 Nov 2006 15:38:32 -0800 Subject: Shutdown tylan5 SNF 2006-11-16 15:38:31: MFS overtemp and n2 carrier alarms Message-ID: during deposition the MFS460 had multiple alarms for N2 carrier N2 and overtemp. From tberg at snf.stanford.edu Mon Nov 20 09:51:19 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 20 Nov 2006 09:51:19 -0800 Subject: Shutdown tylan5 SNF 2006-11-16 15:38:31: MFS overtemp and n2 carrier alarms Message-ID: ran manual and auto test ok From tberg at snf.stanford.edu Mon Nov 20 09:51:39 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 20 Nov 2006 09:51:39 -0800 Subject: Problem tylan5 SNF 2006-11-20 09:51:38: observing n2 flows Message-ID: From axiu at snf.stanford.edu Mon Nov 20 20:48:58 2006 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Mon, 20 Nov 2006 20:48:58 -0800 Subject: Problem tylan5 SNF 2006-11-20 20:48:58: very low doping rate Message-ID: doping rate is 1% as usual. Uniformity is not good. All parameters, temperature, flow...are normal. It might be leakage problem at the BBr3 source. From axiu at snf.stanford.edu Mon Nov 20 20:50:00 2006 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Mon, 20 Nov 2006 20:50:00 -0800 Subject: Shutdown tylan5 SNF 2006-11-20 20:49:59: too low doping rate and bad uniformity Message-ID: From seymour at snf.stanford.edu Wed Nov 22 13:16:27 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 22 Nov 2006 13:16:27 -0800 Subject: Shutdown tylan5 SNF 2006-11-20 20:49:59: too low doping rate and bad uniformity Message-ID: user wants to test system From seymour at snf.stanford.edu Wed Nov 22 13:17:11 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 22 Nov 2006 13:17:11 -0800 Subject: Problem tylan5 SNF 2006-11-20 20:48:58: very low doping rate Message-ID: adjusted N2 flow closer to shown flow/ From seymour at snf.stanford.edu Fri Nov 24 16:44:21 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 24 Nov 2006 16:44:21 -0800 Subject: Shutdown tylan5 SNF 2006-11-24 16:44:21: front zone not at full power and tube injector needs replacing Message-ID: From mdickey at snf.stanford.edu Mon Nov 27 07:34:10 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 27 Nov 2006 07:34:10 -0800 Subject: Comment tylan5 SNF 2006-11-27 07:34:09: Tube pull Message-ID: Tube will need to be pulled and cleaned From mdickey at snf.stanford.edu Tue Nov 28 09:43:21 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 28 Nov 2006 09:43:21 -0800 Subject: Comment tylan5 SNF 2006-11-28 09:43:21: Testing Message-ID: Pull and clean is done. A back up temp. cal is needed and we need to observe the source temp controller while this is happening. No time table on when the back up temp cal will be done. From seymour at snf.stanford.edu Tue Nov 28 14:24:50 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 28 Nov 2006 14:24:50 -0800 Subject: Comment tylan5 SNF 2006-11-28 14:24:49: progress on bbr3 tube has been made Message-ID: the low doping problem has been addressed and the tube was cleaned. The backup T/C calibration program is running at this time and the front zone has been keeping up so far. From seymour at snf.stanford.edu Tue Nov 28 16:11:29 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 28 Nov 2006 16:11:29 -0800 Subject: Shutdown tylan5 SNF 2006-11-24 16:44:21: front zone not at full power and tube injector needs replacing Message-ID: ran backup t/c calibration 800 to 1050. BBR3 concentration problem has been fixed. Tube may require conditioning of a few cycles to come back to the previous doping levels. From tberg at snf.stanford.edu Wed Nov 29 07:05:35 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 29 Nov 2006 07:05:35 -0800 Subject: Comment tylan5 SNF 2006-11-27 07:34:09: Tube pull Message-ID: completed From tberg at snf.stanford.edu Wed Nov 29 07:06:01 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 29 Nov 2006 07:06:01 -0800 Subject: Comment tylan5 SNF 2006-11-28 09:43:21: Testing Message-ID: temp cal done From tberg at snf.stanford.edu Wed Nov 29 07:06:15 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 29 Nov 2006 07:06:15 -0800 Subject: Comment tylan5 SNF 2006-11-16 08:38:48: Adjustment Message-ID: done From tberg at snf.stanford.edu Wed Nov 29 07:06:33 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 29 Nov 2006 07:06:33 -0800 Subject: Comment tylan5 SNF 2006-11-15 17:13:41: controller turned off Message-ID: resolved