Shutdown tylan5 SNF 2006-11-16 15:38:31: MFS overtemp and n2 carrier alarms

seymour at snf.stanford.edu seymour at snf.stanford.edu
Thu Nov 16 15:38:32 PST 2006


during deposition the MFS460 had multiple alarms for N2 carrier N2 and overtemp.




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