From shwong at snf.stanford.edu Thu Sep 7 17:54:58 2006 From: shwong at snf.stanford.edu (shwong at snf.stanford.edu) Date: Thu, 7 Sep 2006 17:54:58 -0700 Subject: Shutdown tylan5 SNF 2006-09-07 17:54:58: Message-ID: MFC Alarm went off in the middle of the doping; the doping profile looks pretty nonuniform and terrible (there are all sorts of different colors all over the wafer instead of one fairly uniform appearance) Additionally, the motor that boats the wafers in and out is very jerky. It jerked and caused one of my wafers to break. Also, the wafers would not boat out on their own; the alarm went off, and I eventually had to go to manual and boat the wafers out. From seymour at snf.stanford.edu Fri Sep 8 13:34:37 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 8 Sep 2006 13:34:37 -0700 Subject: Shutdown tylan5 SNF 2006-09-07 17:54:58: Message-ID: I replaced cooler unit with a spare. The temp is now 36 and dropping so i am releasing the tool. It must be at 10 degrees before using. From seymour at snf.stanford.edu Fri Sep 8 13:35:23 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 8 Sep 2006 13:35:23 -0700 Subject: Comment tylan5 SNF 2006-07-19 15:38:45: Mike solved the problem; flow is normal; doping again Message-ID: noted From seymour at snf.stanford.edu Fri Sep 8 13:35:57 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 8 Sep 2006 13:35:57 -0700 Subject: Problem tylan5 SNF 2006-07-19 10:27:24: B not doped Message-ID: was repaired by mike From maurice at snf.stanford.edu Fri Sep 8 14:49:34 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 8 Sep 2006 14:49:34 -0700 Subject: Shutdown tylan5 SNF 2006-09-08 14:49:33: source controller temp high Message-ID: From maurice at snf.stanford.edu Fri Sep 8 16:54:44 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 8 Sep 2006 16:54:44 -0700 Subject: Shutdown tylan5 SNF 2006-09-08 14:49:33: source controller temp high Message-ID: Ray replaced controller with a spare Temp is coming down (currently 18). Once temp is back at 10, it can be run From maurice at snf.stanford.edu Fri Sep 8 16:55:48 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 8 Sep 2006 16:55:48 -0700 Subject: Problem tylan5 SNF 2006-09-08 16:55:47: Check controller temp Message-ID: Ray replaced controller with a spare Temp is coming down (currently 18). Once temp is back at 10, it can be run