From maurice at snf.stanford.edu Fri Apr 6 16:58:43 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Apr 2007 16:58:43 -0700 Subject: Problem tylan5 SNF 2007-04-06 16:58:42: HiO2 zero has drifted Message-ID: MFS alarm...HiO2 leak...zero has drifted From mtang at snf.stanford.edu Fri Apr 13 09:18:39 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 13 Apr 2007 09:18:39 -0700 Subject: Problem tylan5 SNF 2007-04-06 16:58:42: HiO2 zero has drifted Message-ID: Zero adjusted last week. From mislam at snf.stanford.edu Sat Apr 14 13:08:24 2007 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sat, 14 Apr 2007 13:08:24 -0700 Subject: Problem tylan5 SNF 2007-04-14 13:08:23: MFS Alarm during ramp-up and ramp down Message-ID: From mislam at snf.stanford.edu Mon Apr 16 14:00:16 2007 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Mon, 16 Apr 2007 14:00:16 -0700 Subject: Shutdown tylan5 SNF 2007-04-16 14:00:16: N2 fault Message-ID: during ramp-up and ramp down. Wafers did not get any doping. From maurice at snf.stanford.edu Mon Apr 16 15:30:27 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 16 Apr 2007 15:30:27 -0700 Subject: Shutdown tylan5 SNF 2007-04-16 14:00:16: N2 fault Message-ID: Ray adjusted zero setpoint. mislam is running a test. From maurice at snf.stanford.edu Mon Apr 16 15:30:48 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 16 Apr 2007 15:30:48 -0700 Subject: Problem tylan5 SNF 2007-04-14 13:08:23: MFS Alarm during ramp-up and ramp down Message-ID: Ray adjusted zero setpoint. mislam is running a test. From seymour at snf.stanford.edu Mon Apr 16 15:45:03 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 16 Apr 2007 15:45:03 -0700 Subject: Comment tylan5 SNF 2007-04-16 15:45:02: MFS alarms Message-ID: checked and adjusted MFC zeros, and did auto zero rooutine on MFS460. From shott at snf.stanford.edu Thu Apr 19 15:45:40 2007 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Thu, 19 Apr 2007 15:45:40 -0700 Subject: Shutdown tylan5 SNF 2007-04-19 15:45:39: Shutdown due to BBr line failure .... Message-ID: Tylan 5 is down because one of the teflon lines that supplies nitrogen to the bubbler is disconnected. This resulted in a cabinet-level leak of about 10 ppm as detected by the MST detector. The level returned to zero shortly after the bubbler valves were closed off and a droplet or two of BBr3 evaporated. Thanks, John From seymour at snf.stanford.edu Fri Apr 20 13:38:41 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 20 Apr 2007 13:38:41 -0700 Subject: Shutdown tylan5 SNF 2007-04-19 15:45:39: Shutdown due to BBr line failure .... Message-ID: reconnected N2 line and checked flows needs a test after repair. From seymour at snf.stanford.edu Fri Apr 20 13:39:22 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 20 Apr 2007 13:39:22 -0700 Subject: Problem tylan5 SNF 2007-04-20 13:39:22: needs a test after repair Message-ID: From tberg at snf.stanford.edu Fri Apr 27 06:22:48 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 27 Apr 2007 06:22:48 -0700 Subject: Problem tylan5 SNF 2007-04-20 13:39:22: needs a test after repair Message-ID: test is ok