Shutdown tylan5 SNF 2007-04-16 14:00:16: N2 fault
mislam at snf.stanford.edu
mislam at snf.stanford.edu
Mon Apr 16 14:00:16 PDT 2007
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Problem tylan5 SNF 2007-04-14 13:08:23: MFS Alarm during ramp-up and ramp down
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Shutdown tylan5 SNF 2007-04-16 14:00:16: N2 fault
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during ramp-up and ramp down. Wafers did not get any doping.
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Problem tylan5 SNF 2007-04-14 13:08:23: MFS Alarm during ramp-up and ramp down
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Shutdown tylan5 SNF 2007-04-16 14:00:16: N2 fault
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