From ericp at snf.stanford.edu Tue Jun 15 22:04:10 2010 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Tue, 15 Jun 2010 22:04:10 -0700 Subject: Problem tylan5 SNF 2010-06-15 22:04:09: N2 MFC calibration Message-ID: N2 MFC is alarming while tube is idling: SP=7.4, actual=8.9 which triggers the MFS alarm. From tberg at snf.stanford.edu Wed Jun 16 07:42:49 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 16 Jun 2010 07:42:49 -0700 Subject: Problem tylan5 SNF 2010-06-15 22:04:09: N2 MFC calibration Message-ID: zeroed N2 and checked flow From rostam at snf.stanford.edu Mon Jun 21 22:03:13 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Mon, 21 Jun 2010 22:03:13 -0700 Subject: Shutdown tylan5 SNF 2010-06-21 22:03:13: MFS I/O error Message-ID: when i pressed 'RUN' it said 'MFS I/O ERROR'. Wafers came out undoped. From rostam at snf.stanford.edu Mon Jun 21 22:04:42 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Mon, 21 Jun 2010 22:04:42 -0700 Subject: Problem tylan5 SNF 2010-06-21 22:04:41: cantilever needs alignment Message-ID: big glass cylinder on the cantilever robs against tube From seymour at snf.stanford.edu Tue Jun 22 08:15:41 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 22 Jun 2010 08:15:41 -0700 Subject: Shutdown tylan5 SNF 2010-06-21 22:03:13: MFS I/O error Message-ID: cleaned power supply contacts. adjusted MFC zeros and did auto zero routine. chekced operation and all good. From seymour at snf.stanford.edu Tue Jun 22 08:18:51 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 22 Jun 2010 08:18:51 -0700 Subject: Problem tylan5 SNF 2010-06-21 22:04:41: cantilever needs alignment Message-ID: cantilever is as far back as i can get it. I checked loader operation and large baffle contact to tube is very minimal. From tberg at snf.stanford.edu Tue Jun 22 08:35:27 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 22 Jun 2010 08:35:27 -0700 Subject: Comment tylan5 SNF 2010-06-22 08:35:27: Special Baffle Message-ID: We have ordered a special baffle to address the slight scraping issue on this tube. It should be here by early next week From rostam at snf.stanford.edu Tue Jun 22 23:26:57 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Tue, 22 Jun 2010 23:26:57 -0700 Subject: Shutdown tylan5 SNF 2010-06-22 23:26:57: MFS ALARM-broken glass plate-big cylinder thing stuck-bubbler didn't turn on-undoped wafers Message-ID: I ran BP1000. While the tube was coming out, I heard a crashing noise. When the tube came out completely I noticed that the glass plate at the end of the cantilever had rubbed against the tube and fallen over the cantilever (probably the crashing noise). During the doping step 'MFS ALARM' happened. Bubbler light didn't turn on. Wafers came out undoped. Ran BP1000 again and got the same errors; MFS, bubbler off, and undoped wafers. During boat out, the cantilever came out while the big cylinder thing was stuck inside the tube and didn't come out. Stopped the transfer. My wafers are stuck inside. Summary: - MFS alarm happened again. - Bubbler didn't turn on and wafer didn't get doped again. - Big cylindrical thing got stuck inside the tube again. - Glass plate at then end of the cantilever fell on the cantilever. From rostam at snf.stanford.edu Tue Jun 22 23:45:25 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Tue, 22 Jun 2010 23:45:25 -0700 Subject: Shutdown tylan5 SNF 2010-06-22 23:45:25: don't send the cantilever in Message-ID: I let the cantilever cool down for ~15 minutes. Pulled the cantilever out and this time the big cylindrical thing came out. However it had pushed the glass plate to drop inside the tube. Don't send in the cantilever because the glass plate is somewhere inside the tube. From tberg at snf.stanford.edu Wed Jun 23 07:44:24 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 23 Jun 2010 07:44:24 -0700 Subject: Shutdown tylan5 SNF 2010-06-22 23:26:57: MFS ALARM-broken glass plate-big cylinder thing stuck-bubbler didn't turn on-undoped wafers Message-ID: Found loose connector inside MFs460, reseated checked flow to bubbler OK. Removed baffle that fell off. Tube is now closed waiting for new baffle From tberg at snf.stanford.edu Wed Jun 23 07:45:37 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 23 Jun 2010 07:45:37 -0700 Subject: Comment tylan5 SNF 2010-06-23 07:45:36: Flow issues resolved Message-ID: Flow issues resolved, waiting for modified baffle From tberg at snf.stanford.edu Wed Jun 23 11:39:28 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 23 Jun 2010 11:39:28 -0700 Subject: Problem tylan5 SNF 2010-06-23 11:39:27: Yellow Message-ID: Use With great caution. New baffle on Order From tberg at snf.stanford.edu Wed Jun 23 12:04:24 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 23 Jun 2010 12:04:24 -0700 Subject: Shutdown tylan5 SNF 2010-06-22 23:45:25: don't send the cantilever in Message-ID: Resolved flow issues .use with caution waiting for special baffle From seymour at snf.stanford.edu Thu Jun 24 10:20:57 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 24 Jun 2010 10:20:57 -0700 Subject: Problem tylan5 SNF 2010-06-23 11:39:27: Yellow Message-ID: installed new plug baffle on loader, watched load and baffle doesn't drag on tube.