Shutdown tylan5 SNF 2010-06-22 23:26:57: MFS ALARM-broken glass plate-big cylinder thing stuck-bubbler didn't turn on-undoped wafers

tberg at tberg at
Wed Jun 23 07:44:24 PDT 2010

Found loose connector inside MFs460, reseated checked flow to 
bubbler OK. Removed baffle that fell off. Tube is now closed waiting for new baffle

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