From seymour at snf.stanford.edu Thu Mar 4 11:31:10 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 4 Mar 2010 11:31:10 -0800 Subject: Shutdown tylan5 SNF 2010-03-04 11:31:10: checking out BBR3 flow Message-ID: From seymour at snf.stanford.edu Thu Mar 4 14:03:15 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 4 Mar 2010 14:03:15 -0800 Subject: Shutdown tylan5 SNF 2010-03-04 11:31:10: checking out BBR3 flow Message-ID: found faulty connection for BBR3. Checked flow through bubbler and the vent/tube solenoids system is working as it should now. needs test after repair From seymour at snf.stanford.edu Thu Mar 4 14:03:30 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 4 Mar 2010 14:03:30 -0800 Subject: Problem tylan5 SNF 2010-03-04 14:03:29: needs testing after repair Message-ID: From seymour at snf.stanford.edu Mon Mar 8 11:11:19 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 8 Mar 2010 11:11:19 -0800 Subject: Shutdown tylan5 SNF 2010-03-08 11:11:19: replacing MFS460 cooling fan Message-ID: From seymour at snf.stanford.edu Mon Mar 8 14:26:44 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 8 Mar 2010 14:26:44 -0800 Subject: Shutdown tylan5 SNF 2010-03-08 11:11:19: replacing MFS460 cooling fan Message-ID: replaced the cooling fan for the MFS460 controller. Checked operation of controller. From rostam at snf.stanford.edu Fri Mar 19 02:12:30 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Fri, 19 Mar 2010 02:12:30 -0700 Subject: Shutdown tylan5 SNF 2010-03-19 02:12:30: particles inside the tube - door problem Message-ID: - when the tube door opens, it jolts every 10 sec or so. - When I unloaded my dummy wafers, I found black particles on them. I noticed black particles inside the tube - there is a broken wafer piece inside the tube on one of the boats - Please DO NOT CHANGE the current boats with new ones. The previous boats had tighter slots and broke my wafers. The current boats are GOOD. From seymour at snf.stanford.edu Fri Mar 19 15:26:35 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 19 Mar 2010 15:26:35 -0700 Subject: Shutdown tylan5 SNF 2010-03-19 02:12:30: particles inside the tube - door problem Message-ID: removed loader and rebuilt door and loader. The black particles were door seal. there is a new door seal installed. tube will need to be tested after repair. From seymour at snf.stanford.edu Fri Mar 19 15:27:26 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 19 Mar 2010 15:27:26 -0700 Subject: Problem tylan5 SNF 2010-03-19 15:27:25: needs test after repair Message-ID: loader and door assembly rebuilt. System needs test after repair From seymour at snf.stanford.edu Fri Mar 19 15:28:02 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 19 Mar 2010 15:28:02 -0700 Subject: Problem tylan5 SNF 2010-03-04 14:03:29: needs testing after repair Message-ID: tube was used numerous times since 3/4 From seymour at snf.stanford.edu Fri Mar 19 15:28:18 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 19 Mar 2010 15:28:18 -0700 Subject: Comment tylan5 SNF 2010-01-07 11:09:31: tube good Message-ID: noted From seymour at snf.stanford.edu Fri Mar 19 15:28:30 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 19 Mar 2010 15:28:30 -0700 Subject: Comment tylan5 SNF 2010-02-08 13:07:43: tube being tested by user Message-ID: noted From nharjee at snf.stanford.edu Mon Mar 22 16:15:56 2010 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Mon, 22 Mar 2010 16:15:56 -0700 Subject: Shutdown tylan5 SNF 2010-03-22 16:15:55: Quartz baffle stuck on tube Message-ID: When I attempted to boat out, the quartz baffle close to the door got stuck on the mouth of the tube. Further motion of the boat causes scraping between the cantilevers and the baffle. Looks like cantilevers need adjustment. Left the boat partially open to not risk damage. From seymour at snf.stanford.edu Tue Mar 23 13:56:02 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 23 Mar 2010 13:56:02 -0700 Subject: Shutdown tylan5 SNF 2010-03-22 16:15:55: Quartz baffle stuck on tube Message-ID: after tube heated up loader alignment was off. cooled tube and moved it and adjusted the loader to the tube. Ran in and out in auto at temp and there was no contact between the loader baffles and the tube. From nharjee at snf.stanford.edu Thu Mar 25 11:29:55 2010 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Thu, 25 Mar 2010 11:29:55 -0700 Subject: Comment tylan5 SNF 2010-03-25 11:29:55: Diffusion results Message-ID: Below are sheet resistances (ohm/sq) measured on prometrix from my recent diffusions. Measurements were taken at 5 points on the wafer - 1 center point and 4 points in an 80 mm ring. 1. BPD955, 30 min - Avg: 155.94, Std: 22.74 (14.6%) 2. BP1000, 30 min - Avg: 39.526, Std: 2.897 (7.33%) 3. BP1100, 15 min - Avg: 6.779, Std: 0.1277 (1.88%) The standard deviations of 1 and 2 seem high, but I have no basis for comparison as it's the first time I'm using the tube.