Comment tylan5 SNF 2010-03-25 11:29:55: Diffusion results

nharjee at snf.stanford.edu nharjee at snf.stanford.edu
Thu Mar 25 11:29:55 PDT 2010


Below are sheet resistances (ohm/sq) measured on prometrix from my recent diffusions. Measurements were taken at 5 points on the wafer - 1 center point and 4 points in an 80 mm ring.
1. BPD955, 30 min - Avg: 155.94, Std: 22.74 (14.6%)
2. BP1000, 30 min - Avg: 39.526, Std: 2.897 (7.33%)
3. BP1100, 15 min - Avg: 6.779, Std: 0.1277 (1.88%)
The standard deviations of 1 and 2 seem high, but I have no basis for comparison as it's the first time I'm using the tube.




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