From chcheng at snf.stanford.edu  Fri Jan 11 13:14:30 2013
From: chcheng at snf.stanford.edu (chcheng at snf.stanford.edu)
Date: May 2, 2000
Subject: Shutdown tylan5: 
Message-ID: <mailman.0.1357938869.25982.tylan5-pcs@snf.stanford.edu>

Quartz covers for two loading bars are broken.  Door can not be closed.  Heater has been turned off.  Wafers are still inside.



From gaul at snf.stanford.edu  Fri Jan 11 13:14:30 2013
From: gaul at snf.stanford.edu (gaul at snf.stanford.edu)
Date: May 5, 2000
Subject: Shutdown Clear tylan5: Broken quartzware replaced
Message-ID: <mailman.1.1357938869.25982.tylan5-pcs@snf.stanford.edu>




From chcheng at snf.stanford.edu  Fri Jan 11 13:14:30 2013
From: chcheng at snf.stanford.edu (chcheng at snf.stanford.edu)
Date: Jul 27, 2000
Subject: Problem tylan5: 
Message-ID: <mailman.2.1357938869.25982.tylan5-pcs@snf.stanford.edu>

MFS I/O ERR shown while pushing the "Recipe Run" button



From gaul at snf.stanford.edu  Fri Jan 11 13:14:30 2013
From: gaul at snf.stanford.edu (gaul at snf.stanford.edu)
Date: Aug 11, 2000
Subject: Shutdown tylan5: Bubbler not working properly
Message-ID: <mailman.3.1357938869.25982.tylan5-pcs@snf.stanford.edu>

Nitrogen flow not observed in bubbler when it
should have been.



From gaul at snf.stanford.edu  Fri Jan 11 13:14:30 2013
From: gaul at snf.stanford.edu (gaul at snf.stanford.edu)
Date: Aug 14, 2000
Subject: Shutdown Clear tylan5: Replaced 3 way valve
Message-ID: <mailman.4.1357938869.25982.tylan5-pcs@snf.stanford.edu>




From gaul at snf.stanford.edu  Fri Jan 11 13:14:30 2013
From: gaul at snf.stanford.edu (gaul at snf.stanford.edu)
Date: Aug 14, 2000
Subject: Problem Clear tylan5: replaced 3 way valve
Message-ID: <mailman.5.1357938869.25982.tylan5-pcs@snf.stanford.edu>




From maurice at snf.stanford.edu  Fri Jan 11 13:14:30 2013
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:14:30 -0000
Subject: Shutdown tylan5 SNF 2012-08-17 16:34:20: element braker off
Message-ID: <5597951.179.1345246460495.JavaMail.coral@shine>



From seymour at snf.stanford.edu  Fri Jan 11 13:14:30 2013
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:14:30 -0000
Subject: Shutdown tylan5 SNF 2012-08-17 16:34:20: element braker off
Message-ID: <23356572.74.1345734904128.JavaMail.coral@shine>

element power back on


From maurice at snf.stanford.edu  Fri Jan 11 13:14:30 2013
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:14:30 -0000
Subject: Shutdown tylan5 SNF 2012-10-09 02:10:10: TGO system in fault
Message-ID: <23264051.20.1349773811199.JavaMail.coral@shine>



From shott at snf.stanford.edu  Fri Jan 11 13:14:30 2013
From: shott at snf.stanford.edu (shott at snf.stanford.edu)
Date: Fri, 11 Jan 2013 21:14:30 -0000
Subject: Shutdown tylan5 SNF 2012-10-09 02:10:10: TGO system in fault
Message-ID: <25634653.6.1349791024332.JavaMail.coral@shine>

TGO CL-96 system is back in operation.
John