Doping profile?

[Yahong Yao]

Hi everyone,

Does anybody have the doping profile data for tylan5, i.e. the chart of 
concentration vs depth?  What are the recipe and process conditions?

Thanks in advance.

Yh
Phone: (408)252-6410 x.407
Mobile:(408)718-8831
Fax:   (408)252-6430



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