From ericp at snf.stanford.edu Mon Jun 20 18:06:18 2005 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Mon, 20 Jun 2005 18:06:18 -0700 Subject: Shutdown tylan6 SNF 2005-06-20 18:06:17: POCl smell in the lab Message-ID: At about 17:45, Uli came out to get me for a HCl-like odor at the silicide wetbench. I couldn't find the source by nosing around, so I checked all possible Chlorine sources in the area. When I came up to Bank2, I could really smell Chlorine at the load end. I checked and POCl was running. Per Jim McVittie, I aborted the tube with 00:18:45 remaining in the deposition step. I valved off the POCL source bottle in the rear cabinet. (BOTH valves, in and out). I don't think the leak is in the cabinet, but I did this as a precaution. The smell was most strong at the load end of the tube (where you load the wafers, in the lab, not in the chase). The smell disappeared within a minute or two of aborting the run. From seymour at snf.stanford.edu Tue Jun 21 11:15:51 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 21 Jun 2005 11:15:51 -0700 Subject: Shutdown tylan6 SNF 2005-06-20 18:06:17: POCl smell in the lab Message-ID: realigned door, replaced source temp. unit fan and checked operation of system. Ran POCL3 for twenty mins and chlorine not escaping to the load arerealignrealigned door, replaced source temp. unit fan and checked operation of system. Ran POCL3 for twenty mins and chlorine not escaping to the load area. From seymour at snf.stanford.edu Tue Jun 21 11:17:23 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 21 Jun 2005 11:17:23 -0700 Subject: Problem tylan6 SNF 2005-06-21 11:17:22: needs test after POCL3 source replaced. Message-ID: The source bubbler was low so it was changed during tube maintenance.