From tberg at snf.stanford.edu  Thu Sep  7 11:22:03 2006
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 7 Sep 2006 11:22:03 -0700
Subject: Comment tylan6 SNF 2006-09-07 11:22:03: temp low
Message-ID: <mailman.111.1356283696.4992.tylan6-pcs@snf.stanford.edu>

Reset TCU board and checked voltage ok now



From axiu at snf.stanford.edu  Mon Sep 25 17:48:28 2006
From: axiu at snf.stanford.edu (axiu at snf.stanford.edu)
Date: Mon, 25 Sep 2006 17:48:28 -0700
Subject: Problem tylan6 SNF 2006-09-25 17:48:28: P dope not uniform and more
Message-ID: <mailman.112.1356283696.4992.tylan6-pcs@snf.stanford.edu>

Have run the same recipe for two runs. The doped rate is different. 
In the same run, the dope rate for different wafer is different also.
The dopant bottle may be empty?