Problem tylan6 SNF 2006-09-25 17:48:28: P dope not uniform and more

axiu at snf.stanford.edu axiu at snf.stanford.edu
Mon Sep 25 17:48:28 PDT 2006


Have run the same recipe for two runs. The doped rate is different. 
In the same run, the dope rate for different wafer is different also.
The dopant bottle may be empty?  
 




More information about the tylan6-pcs mailing list