Shutdown tylan6 SNF 2007-08-29 14:14:47: smoke at end of run

maurice at maurice at
Wed Aug 29 14:14:47 PDT 2007

At end of run, users saw smoke as tube was opening.  He aborted run ( alarm ack  twice) to send tube back in.
There are no wafers inside.  He was running a dummy run.

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