From kuanlinc at snf.stanford.edu Sat Jun 2 10:41:01 2007 From: kuanlinc at snf.stanford.edu (kuanlinc at snf.stanford.edu) Date: Sat, 2 Jun 2007 10:41:01 -0700 Subject: Comment tylan6 SNF 2007-06-02 10:41:00: diffusion doping working ok Message-ID: From tberg at snf.stanford.edu Mon Jun 4 06:35:43 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 4 Jun 2007 06:35:43 -0700 Subject: Problem tylan6 SNF 2007-05-29 10:41:52: tube 6 I/O problem! Message-ID: replaced slave cpu board From tberg at snf.stanford.edu Mon Jun 4 06:35:53 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 4 Jun 2007 06:35:53 -0700 Subject: Comment tylan6 SNF 2007-05-31 14:03:15: Changed Slave CPU board Message-ID: noted From seymour at snf.stanford.edu Tue Jun 5 15:49:44 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 5 Jun 2007 15:49:44 -0700 Subject: Comment tylan6 SNF 2007-06-05 15:49:43: Boat loader won't come out Message-ID: Adjusted door in flag which had gone past the door in sensor From xzhuan1 at snf.stanford.edu Wed Jun 13 15:23:28 2007 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Wed, 13 Jun 2007 15:23:28 -0700 Subject: Problem tylan6 SNF 2007-06-13 15:23:27: no doping Message-ID: I ran pocl1000 for one hour and nothing happened to my wafers. Wafers not doped. From mislam at snf.stanford.edu Wed Jun 13 18:22:50 2007 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Wed, 13 Jun 2007 18:22:50 -0700 Subject: Problem tylan6 SNF 2007-06-13 18:22:49: TEMPL temperature lagging Message-ID: TEMPL zone stays about 100C below TEMPS even though powe level shows 100% for that zone. From tberg at snf.stanford.edu Thu Jun 14 09:10:25 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 14 Jun 2007 09:10:25 -0700 Subject: Comment tylan6 SNF 2007-06-05 15:49:43: Boat loader won't come out Message-ID: adjusted flag From tberg at snf.stanford.edu Thu Jun 14 09:10:53 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 14 Jun 2007 09:10:53 -0700 Subject: Comment tylan6 SNF 2007-06-02 10:41:00: diffusion doping working ok Message-ID: noted From seymour at snf.stanford.edu Thu Jun 14 09:52:19 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 14 Jun 2007 09:52:19 -0700 Subject: Problem tylan6 SNF 2007-06-13 18:22:49: TEMPL temperature lagging Message-ID: replaced fan on source temp controller. From seymour at snf.stanford.edu Thu Jun 14 09:54:21 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 14 Jun 2007 09:54:21 -0700 Subject: Problem tylan6 SNF 2007-06-13 15:23:27: no doping Message-ID: found air line to source N2 solenoid cracked and leaking. replaced line and checked for source flow. From mislam at snf.stanford.edu Thu Jun 14 19:42:21 2007 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Thu, 14 Jun 2007 19:42:21 -0700 Subject: Problem tylan6 SNF 2007-06-14 19:42:20: TEMPL zone temp lagging Message-ID: Lags by about 100C, never reach desired temperature From tberg at snf.stanford.edu Fri Jun 15 14:35:22 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 15 Jun 2007 14:35:22 -0700 Subject: Comment tylan6 SNF 2007-06-15 14:35:22: Doing Temp Cal Message-ID: From tberg at snf.stanford.edu Mon Jun 18 06:35:00 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Jun 2007 06:35:00 -0700 Subject: Problem tylan6 SNF 2007-06-14 19:42:20: TEMPL zone temp lagging Message-ID: Did temp cal all zones look OK now From tberg at snf.stanford.edu Mon Jun 18 06:35:12 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Jun 2007 06:35:12 -0700 Subject: Comment tylan6 SNF 2007-06-15 14:35:22: Doing Temp Cal Message-ID: completed