From rostam at snf.stanford.edu  Thu Nov 27 02:53:21 2008
From: rostam at snf.stanford.edu (rostam at snf.stanford.edu)
Date: Thu, 27 Nov 2008 02:53:21 -0800
Subject: Problem tylan6 SNF 2008-11-27 02:53:20: smoking 10 min after tube out
Message-ID: <mailman.187.1356283697.4992.tylan6-pcs@snf.stanford.edu>

I ran 60min doping at 750. The tube came out and i let wafers cool down for 10 min. After i pressed 'alarm ack' to send the tube in, i noticed a thick smoke coming out of the tube and it continued until the tube completely closed.