Problem tylan6 SNF 2008-11-27 02:53:20: smoking 10 min after tube out

[rostam at snf.stanford.edu]

I ran 60min doping at 750. The tube came out and i let wafers cool down for 10 min. After i pressed 'alarm ack' to send the tube in, i noticed a thick smoke coming out of the tube and it continued until the tube completely closed.