Problem tylan6 SNF 2008-11-27 02:53:20: smoking 10 min after tube out

rostam at rostam at
Thu Nov 27 02:53:21 PST 2008

I ran 60min doping at 750. The tube came out and i let wafers cool down for 10 min. After i pressed 'alarm ack' to send the tube in, i noticed a thick smoke coming out of the tube and it continued until the tube completely closed.

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