From seymour at snf.stanford.edu Tue Jan 20 13:51:19 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 20 Jan 2009 13:51:19 -0800 Subject: Problem tylan6 SNF 2009-01-20 13:51:18: found system in alarm mode Message-ID: the front panel said MSF Alarm. The MFS460 was locked up with POCL3 interlock showing and N2 carrier indicating a flow error. i had to abort run to gain control of system. I checked N2 carrier zero and adjusted slightly. I flowed N2 carrier to vent to the bubbler and to the tube with no alarms on flow. User will statart another test. From kwankyu at snf.stanford.edu Tue Jan 20 17:04:15 2009 From: kwankyu at snf.stanford.edu (kwankyu at snf.stanford.edu) Date: Tue, 20 Jan 2009 17:04:15 -0800 Subject: Comment tylan6 SNF 2009-01-20 17:04:14: It works fine. Message-ID: It works fine. The tube finished process and the color of wafer looks like it is doped. I found that there is a crack at the bottom of the quartz partition, which is at the end of cantilever.