Problem tylan6 SNF 2010-04-28 20:37:13: NO POCL3

pnataraj at snf.stanford.edu pnataraj at snf.stanford.edu
Wed Apr 28 20:37:13 PDT 2010


I did 1000 POCL3 for 1 hr.
I did not get any MFC error, it was flowing carrier gas and all other 
gas flows were fine. But no deposition.
Are we sure there is POCl3 in bubler?




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