From maurice at snf.stanford.edu Fri Oct 1 10:49:55 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 1 Oct 2010 10:49:55 -0700 Subject: Comment tylan6 SNF 2010-10-01 10:49:55: testing Message-ID: From maurice at snf.stanford.edu Fri Oct 1 16:08:47 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 1 Oct 2010 16:08:47 -0700 Subject: Comment tylan6 SNF 2010-10-01 16:08:47: update Message-ID: Ran POCL775 three times. Opened/closed door between each run. No smoke or smells. We will try a higher temp next week. - Door flag needs adjustment. Tube must be opened manually. From seymour at snf.stanford.edu Mon Oct 4 08:35:47 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 4 Oct 2010 08:35:47 -0700 Subject: Comment tylan6 SNF 2010-10-04 08:35:46: door flag adjested Message-ID: door opens in auto when run pushed. Ready for higher temp testing From maurice at snf.stanford.edu Mon Oct 4 15:31:42 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 4 Oct 2010 15:31:42 -0700 Subject: Comment tylan6 SNF 2010-10-04 15:31:42: Ran 1000 POCl/no odor/ no smoke Message-ID: Ray, Joey Doll, Gary S and I didn't see smoke or smell anything during this 35 min, 1000c test From tberg at snf.stanford.edu Wed Oct 6 09:56:06 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 6 Oct 2010 09:56:06 -0700 Subject: Shutdown tylan6 SNF 2010-08-18 19:35:30: smoke was coming out inside the cleanroom for 5min Message-ID: Did tube pull door adjustment and numerous tests no smell no vapor From tberg at snf.stanford.edu Wed Oct 6 09:56:22 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 6 Oct 2010 09:56:22 -0700 Subject: Comment tylan6 SNF 2010-08-17 06:24:38: Turned on Element CB heating up Message-ID: noted From tberg at snf.stanford.edu Wed Oct 6 09:56:37 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 6 Oct 2010 09:56:37 -0700 Subject: Comment tylan6 SNF 2010-08-29 13:29:10: 850 pocl3 okay Message-ID: noted From tberg at snf.stanford.edu Wed Oct 6 09:56:53 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 6 Oct 2010 09:56:53 -0700 Subject: Comment tylan6 SNF 2010-07-20 18:29:25: Please leave the tube closed Message-ID: noted From tberg at snf.stanford.edu Wed Oct 6 09:57:12 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 6 Oct 2010 09:57:12 -0700 Subject: Shutdown tylan6 SNF 2010-09-01 07:40:02: Problems with thermal plug at door end ... Message-ID: completed From tberg at snf.stanford.edu Wed Oct 6 09:57:30 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 6 Oct 2010 09:57:30 -0700 Subject: Comment tylan6 SNF 2010-09-02 15:00:43: tube pull and clean completed. Message-ID: Did tube pull door adjustment and numerous tests no smell no vapor From tberg at snf.stanford.edu Wed Oct 6 09:57:39 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 6 Oct 2010 09:57:39 -0700 Subject: Comment tylan6 SNF 2010-09-09 06:06:40: ran pocl3850 Message-ID: noted From tberg at snf.stanford.edu Wed Oct 6 09:57:59 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 6 Oct 2010 09:57:59 -0700 Subject: Comment tylan6 SNF 2010-09-23 10:03:51: tylan6 update Message-ID: logged From tberg at snf.stanford.edu Wed Oct 6 09:58:12 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 6 Oct 2010 09:58:12 -0700 Subject: Comment tylan6 SNF 2010-10-01 10:49:55: testing Message-ID: noted From tberg at snf.stanford.edu Wed Oct 6 09:58:32 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 6 Oct 2010 09:58:32 -0700 Subject: Comment tylan6 SNF 2010-10-01 16:08:47: update Message-ID: Did tube pull door adjustment and numerous tests no smell no vapor From tberg at snf.stanford.edu Wed Oct 6 09:58:42 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 6 Oct 2010 09:58:42 -0700 Subject: Comment tylan6 SNF 2010-10-04 08:35:46: door flag adjested Message-ID: Did tube pull door adjustment and numerous tests no smell no vapor From tberg at snf.stanford.edu Wed Oct 6 09:59:59 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 6 Oct 2010 09:59:59 -0700 Subject: Comment tylan6 SNF 2010-10-06 09:59:58: Ran POCl3 Message-ID: Ran 1000POCl3 for 30 minutes. no problem From tberg at snf.stanford.edu Wed Oct 6 10:23:38 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 6 Oct 2010 10:23:38 -0700 Subject: Problem tylan6 SNF 2010-10-06 10:23:38: Please only run when staff are present Message-ID: As noted we have run several runs and no problems, but we would like to ask that we only run when staff are present From maurice at snf.stanford.edu Wed Oct 6 11:25:36 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Oct 2010 11:25:36 -0700 Subject: Problem tylan6 SNF 2010-10-06 11:25:35: POCl restrictions Message-ID: For now, POCl use is restricted to Monday through Fri; from 7 am to 5 pm (staff hours) The tube has been pulled and cleaned. The door seal has has been replaced and the loader has been rebuilt. We have adjusted the air flow in the scavenger to maximize the draw at the side port. We have opened/closed the door repeatedly and run recipes to make sure the door is closing properly. We have run both high and low temperature recipes and have not seen any smoke or smelled anything. For now, the system is yellow lighted and we will continue closely monitor and restrict its usage. If you see smoke or think a smell is coming from POCl, contact a staff member immediately. If you can't contact a staff member, abort the tube and shut it down on coral. From jcdoll at snf.stanford.edu Fri Oct 8 12:51:06 2010 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Fri, 8 Oct 2010 12:51:06 -0700 Subject: Comment tylan6 SNF 2010-10-08 12:51:05: Results look good Message-ID: Ran POCL775 for 35 min, measured sheet resistance on prometrix. Standard wbdiff clean with HF last, wafers loaded every other slot at the black sharpie mark, fronts facing the door. One real wafer, two test wafers sandwiching it. 7/18/10: 183.8 +/- 1.4 ohm/sq 10/8/10: 192.7 +/- 2.7 ohm/sq Results look good. Slightly higher sheet resistance may be due to an extra 5-10 minutes of stabilization (hold key) on the 7/18 run but none on the 10/8 run. But results within 5% of pre-shutdown. From maurice at snf.stanford.edu Fri Oct 8 14:36:10 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 8 Oct 2010 14:36:10 -0700 Subject: Comment tylan6 SNF 2010-10-08 14:36:10: JoeyD weekend testing Message-ID: Joey D will be running POCl tests over the weekend. He will be monitoring the systems for any problems and gathering resistivity data. He has be trained on how to shutdown the system if any problems arise. From jcdoll at snf.stanford.edu Sun Oct 10 19:25:21 2010 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Sun, 10 Oct 2010 19:25:21 -0700 Subject: Comment tylan6 SNF 2010-10-10 19:25:20: Tube still looks good Message-ID: Have done four runs since Friday - sheet resistance matches run-to-run within a few percent. Still no smells. From tberg at snf.stanford.edu Mon Oct 11 06:19:56 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 11 Oct 2010 06:19:56 -0700 Subject: Comment tylan6 SNF 2010-10-04 15:31:42: Ran 1000 POCl/no odor/ no smoke Message-ID: noted From tberg at snf.stanford.edu Mon Oct 11 06:20:11 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 11 Oct 2010 06:20:11 -0700 Subject: Comment tylan6 SNF 2010-10-06 09:59:58: Ran POCl3 Message-ID: noted From tberg at snf.stanford.edu Mon Oct 11 06:20:41 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 11 Oct 2010 06:20:41 -0700 Subject: Problem tylan6 SNF 2010-10-06 10:23:38: Please only run when staff are present Message-ID: noted From tberg at snf.stanford.edu Mon Oct 11 06:20:58 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 11 Oct 2010 06:20:58 -0700 Subject: Comment tylan6 SNF 2010-10-08 12:51:05: Results look good Message-ID: noted From clifton at snf.stanford.edu Thu Oct 14 12:19:20 2010 From: clifton at snf.stanford.edu (clifton at snf.stanford.edu) Date: Thu, 14 Oct 2010 12:19:20 -0700 Subject: Comment tylan6 SNF 2010-10-14 12:19:20: boat stopped when loading step Message-ID: Accidentally ran furnace before enabling on Coral. The boat stopped during the middle of the loading step while running POCL3800. I logged in and then I was able to load the boat manually and restart the program. Not sure if this is typical behavior. From maurice at snf.stanford.edu Thu Oct 14 12:57:57 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 14 Oct 2010 12:57:57 -0700 Subject: Problem tylan6 SNF 2010-10-14 12:57:56: Source zone high Message-ID: User stopped recipe for temps to reach set point setpoint 800 source 828 and calling for 56% power From tberg at snf.stanford.edu Thu Oct 14 13:16:02 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 14 Oct 2010 13:16:02 -0700 Subject: Problem tylan6 SNF 2010-10-14 12:57:56: Source zone high Message-ID: reset TCU reseated TC it is controlling now From davidw13 at snf.stanford.edu Thu Oct 14 14:23:21 2010 From: davidw13 at snf.stanford.edu (davidw13 at snf.stanford.edu) Date: Thu, 14 Oct 2010 14:23:21 -0700 Subject: Comment tylan6 SNF 2010-10-14 14:23:20: front temp is low Message-ID: Having issues stabalizing the front temperature of the furnace. Trying to reach set temp of 800. First attempt we held the furnace for ~1 hour and it only managed to get to 785, so we aborted and re-ran. The second time we let the furnace run its course rather than holding it, but it took ~40 minutes(10 minutes into diffusion) to stabalize at 800. From jcdoll at snf.stanford.edu Thu Oct 14 22:39:29 2010 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Thu, 14 Oct 2010 22:39:29 -0700 Subject: Comment tylan6 SNF 2010-10-14 22:39:28: boat loader misbehaving Message-ID: twice today the loader stopped by itself while loading or unloading. restarting the recipe or manually closing fixes it. but something to keep an eye on. From tberg at snf.stanford.edu Fri Oct 15 09:18:08 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 15 Oct 2010 09:18:08 -0700 Subject: Shutdown tylan6 SNF 2010-10-15 09:18:08: Temp Cal Message-ID: Shut down for temp Cal. also checked loader operation From seymour at snf.stanford.edu Mon Oct 18 11:36:39 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 18 Oct 2010 11:36:39 -0700 Subject: Comment tylan6 SNF 2010-10-18 11:36:38: On Thursday I opened and closed tubein auto Message-ID: All three runs were without any loader problems. From seymour at snf.stanford.edu Tue Oct 19 13:54:35 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 19 Oct 2010 13:54:35 -0700 Subject: Shutdown tylan6 SNF 2010-10-15 09:18:08: Temp Cal Message-ID: temp cal is complete From seymour at snf.stanford.edu Tue Oct 19 13:55:28 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 19 Oct 2010 13:55:28 -0700 Subject: Comment tylan6 SNF 2010-10-14 14:23:20: front temp is low Message-ID: ran temp cal front zone now is controlling temp. From seymour at snf.stanford.edu Thu Oct 21 13:59:47 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 21 Oct 2010 13:59:47 -0700 Subject: Comment tylan6 SNF 2010-10-18 11:36:38: On Thursday I opened and closed tubein auto Message-ID: noted From seymour at snf.stanford.edu Thu Oct 21 14:02:23 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 21 Oct 2010 14:02:23 -0700 Subject: Comment tylan6 SNF 2010-10-21 14:02:22: loader not closing Message-ID: I repositioned rear loader linear bearing and keeper. I opened and closed the tube in auto using the recipe and door closed every time. From maurice at snf.stanford.edu Fri Oct 29 15:33:25 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 29 Oct 2010 15:33:25 -0700 Subject: Comment tylan6 SNF 2010-10-29 15:33:24: P1000SLO created Message-ID: Created P1000SLO. Same as POCL1000 but colls down to 600c slowly and opes only after Alarm Ack pressed (for mislam) From jcdoll at snf.stanford.edu Sat Oct 30 11:42:12 2010 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Sat, 30 Oct 2010 11:42:12 -0700 Subject: Problem tylan6 SNF 2010-10-30 11:42:12: loader stops even in manual mode Message-ID: am running a deposition right now. after pressing ACK to start the process, the loader got about 25% of the way in and stopped. i switched to manual mode, and it moved for another few inches before it stopped (while holding down the IN button. if i waited a second or briefly moved the loader back out, i was able to keep moving the loader into the tube. eventually i was able to get it in and verified DNTLK = ON on tycom.